Papers by Keyword: Oxygen Precipitates

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Authors: Sergio Pizzini, Simona Binetti, Alessia Le Donne, E. Leoni, Maurizio Acciarri, Giancarlo Salviati, L. Lazzarini
57
Authors: Scott A. McHugo, T. Heiser, H. Hieslmair, C. Flink, Eicke R. Weber, S.M. Myers, G.A. Petersen
461
Authors: Atsushi Ikari, Katsuhiko Nakai, Y. Tachikawa, H. Deai, Y. Hideki, Yasumitsu Ohta, Naoya Masahashi, S. Hayashi, T. Hoshino, Wataru Ohashi
161
Authors: Kozo Nakamura, Junsuke Tomioka

Abstract: This paper presents a model for the analysis of the surface nucleation and growth of Ni silicide on silicon wafers contaminated by Ni. The...

103
Authors: Seiichi Isomae, Hidetsugu Ishida, Toshihiko Itoga, Kazuyuki Hozawa
349
Authors: Eugene B. Yakimov, Olga V. Feklisova, Maurizio Acciarri, Anna Cavallini, Sergio Pizzini
39
Authors: Julien Nicolai, Nelly Burle, Bernard Pichaud

Abstract: High temperature annealing effects on Oxygen-induced defects formation has been studied by IR-LST, FTIR and TEM techniques. The results show...

188
Authors: Mitsuhiro Hasebe, Katsuhiko Nakai, Wataru Ohashi, Y. Ikematsu, T. Mizutani, T. Iwasaki
449
Authors: Béla Pécz, O. Klettke, Gerhard Pensl, J. Stoemenos
961
Authors: Dawid Kot, Gudrun Kissinger, Markus Andreas Schubert, Andreas Sattler, Timo Müller

Abstract: Two getter tests were carried out in order to study the getter efficiency of oxygen precipitates in silicon samples contaminated with low...

278
Showing 1 to 10 of 26 Paper Titles