Papers by Keyword: Polymer Particle

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Authors: Y.S. Lu, Yasuhiro Tani, K. Soutome, Yasushi Kamimura

Abstract: This paper deals with a novel polishing technology using polymer particles. It has been proposed and developed by the authors for the...

263
Authors: Naoaki Ichinoho, Junji Murata, Yasuhiro Tani, Takeshi Yanagihara, Miyuki Yamada

Abstract: The development of composite abrasives considering the cleanability of the polished work piece was previously reported. In glass polishing,...

321
Authors: Yu Lou, Wei Yao Zhu, Xue Ling Zhang, Yun Qian Long

Abstract: Nano/micro polymer particles of acrylamide (AM), acrylic acid (AA), methyl methacrylate (MMA) are used to enhance oil recovery. Swelling...

3993
Authors: Xue Feng Xu, H.T. Ma, B.X. Ma, Wei Peng

Abstract: In order to increase the material removal rate of silicon wafer, composite abrasives slurry was used in CMP. The mechanism of interaction...

214
Authors: Wen Jun Zhou, Yasuhiro Tani

Abstract: A new concept of finishing technology, Multi-Body Finishing (MBF), is proposed to broaden the concept of Polymer Particles Assisted...

267
Authors: Xue Feng Xu, H.F. Chen, H.T. Ma, B.X. Ma, Wei Peng

Abstract: In order to increase the material removal rate of silicon wafer, composite abrasives slurry was used in CMP. Zeta potential of polymer...

231
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