Papers by Keyword: Stacking Fault

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Authors: Kuniaki Yagi, Takamitsu Kawahara, Naoki Hatta, Hiroyuki Nagasawa
Abstract: A new technique that reduces stacking fault (SF) density in 3C-SiC, termed switch-back epitaxy (SBE), is demonstrated regarding its effects on morphological and electrical properties. SBE is a homoepitaxial growth process on backside of 3C-SiC grown on undulant-Si. The key feature of SBE, the surface polarity of residual SFs in 3C-SiC, which cannot be erased by heteroepitaxial growth on undulant-Si, is converted from the Si-face to the C-face. The SF density on the surface of 3C-SiC grown by SBE shows a remarkable decrease to one-seventh lower than that on undulant- Si. The leakage current of pn-diode epitaxially fabricated on the 3C-SiC substrate grown by SBE decreases to as low as one-thirtieth that on 3C-SiC substrate grown without SBE. These results suggest that SBE eliminates the SFs on the surface of 3C-SiC and subsequently reduces the leakage current at pn-junction thus fabricated.
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Authors: Yoshitaka Umeno, Kuniaki Yagi, Hiroyuki Nagasawa
Abstract: We carry out ab initio density functional theory calculations to investigate the fundamental mechanical properties of stacking faults in 3C-SiC, including the effect of stress and doping atoms (substitution of C by N or Si). Stress induced by stacking fault (SF) formation is quantitatively evaluated. Extrinsic SFs containing double and triple SiC layers are found to be slightly more stable than the single-layer extrinsic SF, supporting experimental observation. Effect of tensile or compressive stress on SF energies is found to be marginal. Neglecting the effect of local strain induced by doping, N doping around an SF obviously increase the SF formation energy, while SFs seem to be easily formed in Si-rich SiC.
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Authors: Mihyun Kang, Wan Chuck Woo, Vyacheslav Em, Young Kook Lee, Baek Seok Seong
Abstract: Deformation behavior of high Mn TWIP (twinning induced plasticity) steels was observed using neutron diffraction. Two kinds of specimens were prepared; 0 and 2 wt% of Al TWIP steels. The lattice strains and peak widths of hkl grains were measured under tensile loading. The results provide an insight into the influence of the Al contents on the deformation behavior associated with the microstructure changes in TWIP steels.
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Authors: Akio Shima, Haruka Shimizu, Yuki Mori, Masakazu Sagawa, Kumiko Konishi, Ryusei Fujita, Takashi Ishigaki, Naoki Tega, Keisuke Kobayashi, Shintaroh Sato, Yasuhiro Shimamoto
Abstract: We investigated improvement ways of to overcome these reliability issues in a 3.3 kV 4H-SiC DMOSFET. JFET doping with (i) narrow width and (ii) deeper depth than that of the p-well region successfully reduced the electric field in the gate insulator and the on-voltage simultaneously. We achieved a low Ron of 26 mΩcm2 at a Vg of +15 V and 150 °C. And highly reliable chips of 0.1 Fit were also achieved both at a positive and negative gate bias of +15 V/ -8 V with MTTF of intrinsic lifetime over 20 years at 3 MV/cm. BTI characterstics both in positive and negative biases also proved reliability over 20 years. The body diode showed stable behavior under forward current operation which is suitable for an external diode-less power module.
493
Authors: Nicolo’ Piluso, Massimo Camarda, Ruggero Anzalone, Francesco La Via
Abstract: Recently, a new Micro-Raman technique has been used to detect extended defects in 4H-SiC homoepitaxy. The method is based on the local increase of free carriers in undoped epitaxies (n < 1016 at/cm-3) produced by a high power laser. The Longitudinal optical Raman mode (LO) is coupled with the electronic plasma generated by the laser pumping; such a Raman signal is sensitive to crystallographic defects that lead to trapping (or dispersion) of the free carriers which results in a loss of coupling. The monitoring of the LOPC allows determining the spatial morphology of extended defects. The results show that the detection of defects via the induced-LOPC (i-LOPC) is totally independent from the stacking fault photoluminescence signals that cover a large energy range up to 0,7eV thus allowing for a single-scan simultaneous determination of any kind of stacking fault. Also, the i-LOPC method shows the connection between the carrier concentration and the carrier lifetime for undoped film, obtaining meaningful information related to electrical properties of the film, and demonstrating that this technique is a fast, reliable and powerful method to characterize most of crystallographic defects (extended and point-like defects) in the semiconductor field.
335
Authors: Takashi Aigo, Wataru Ito, Hiroshi Tsuge, Hirokatsu Yashiro, Masakazu Katsuno, Tatsuo Fujimoto, Wataru Ohashi
Abstract: 4H-SiC epitaxial growth on 2˚ off-axis substrates using trichlorosilane (TCS) is presented. Good surface morphology was obtained for epilayers with C/Si ratios of 0.6 and 0.8 at a growth temperature of 1600°C. The triangle defect density was reduced to a level below 5 cm-2 at 1600°C and below 1 cm-2 at 1625°C for a C/Si ratio of 0.8. Photoluminescence (PL) measurements were carried out with band-pass filters of 420 nm, 460 nm, and 480 nm to detect stacking faults. A stacking fault density of below 5 cm-2 was achieved at 1600°C and 1625°C with a C/Si ratio of 0.8. The optimal conditions for TCS growth were a C/Si ratio of 0.8 and a growth temperature of 1600°C. The evaluation of stacking faults and etch pit density indicated that the use of 2˚ off-axis substrates and TCS is effective for reducing basal plane dislocations. Comparing these results to those using silane (SiH4) with HCl added, it was demonstrated that TCS is much more suitable for obtaining high-quality epilayers on 2º off-axis substrates.
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Authors: Teddy Robert, Maya Marinova, Sandrine Juillaguet, Anne Henry, Efstathios K. Polychroniadis, Jean Camassel
Abstract: A new type of 6H zigzag faults has been identified from high resolution transmission electron microscopy (HRTEM) measurements performed on low-doped 4H-SiC homoepitaxial layer grown on off-axis substrates in a hot-wall CVD reactor. They are made of half unit cells of 6H with corresponding low temperature photoluminescence (LTPL) response ranging from about 3 eV to 2.5 eV at liquid helium temperature.
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Authors: Teddy Robert, Sandrine Juillaguet, Maya Marinova, Thierry Chassagne, Ioannis Tsiaousis, N. Frangis, Efstathios K. Polychroniadis, Jean Camassel
Abstract: The electronic structure of in-grown 8H stacking faults in 4H-SiC matrix has been investigated in detail. After assessment of the structural properties by high resolution transmission electron microscopy, we focus on the electronic structure. We show that one unit cell of 8H does not behave like a single type-II quantum well but, rather, like two type-II quantum wells of 3C coupled by a thin hexagonal barrier. Using a transfer matrix method, we compute the corresponding transition energies, taking into account the effect of the valence band offset and built-in electric field. A good agreement is found with the experimental data collected from low temperature photoluminescence spectroscopy.
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Authors: Glenn E. Beltz, Margherita Chang, Anna Machová
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Authors: A.V. Markidonov
Abstract: Restructuring process of vacancy voids under the influence of post-cascade shock waves is studied by molecular dynamics method. It is shown that depending on the time gaps, which generate waves, voids can either be combined into a single complex, or break up into separate parts.
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