Papers by Keyword: Cantilever

Paper TitlePage

Authors: Dong Sheng Wang, Yu Tian Wang, Wei Wei Pan
Abstract: Based on the relation between the wavelength shift of sensing FBG and the strain, a flow measuring device of the circular target binding Fiber Bragg Grating with the cantilever is designed and the mathematical model based on a circular target flow measurement system is established. Through the flow experiment, we can get the flow test result. The experimental data error analysis can be concluded to verify the feasibility and precision of the design.
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Authors: Zhao Wei Jiang, Zhen Yin, Hua Li, Jun Zhang
Abstract: A mathematical model for the Double-crystal Piezoelectric Cantilever Generating Unit (DPCGU) was built and a new Piezoelectric Generator Based on Stairs (PGBS) with DPCGU was designed in this paper, the energy conversion efficiency of the PGBS which makes use of human kinetic energy was improved and the deficiencies of existing piezoelectric energy harvesting technology were avoided. The experiment of the generating capacity for the PGBS was carried out, and the consistency of the mathematical model results and the experimental results was verified by comparison.
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Authors: Xiao Qian Wang, Shu Bin Yan, Ke Zhen Ma, Peng Fei Xu, Wen Dong Zhang
Abstract: To meet a high-precision accelerometer resistance of temperature, humidity and other external noise, a new multi-ring cascade optical accelerometer structure is designed. The micro-ring resonator on the cantilever beam based on the photo-elastic effect and the contrast are fabricated with the same manufacturing process and size, which can effectively meet the consistency of the contrast and test micro-ring resonator on the cantilever. The one resonance point curve will split into two under the acceleration, thus the acceleration value can be obtained by detecting the wavelength of the two resonant points. By testing the cascade race-track shaped micro-ring resonator at different temperatures, the Q=104, the test requirement of cascade race-track shaped micro-ring accelerometer in different environments is greatly met. The design can be widely applied to the occasions of penetration system with high impact, strong vibration and so on. And the anti-noise and anti-jamming features of the integrated miniaturized high-sensitivity MOEMS sensors are realized.
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Authors: Yan Hui Yuan, He Jun Du, Pei Hong Wang
Abstract: A micro silicon cantilever actuated by ZnO thin film was designed, fabricated and characterized. The ZnO thin film was deposited by RF sputtering at room temperature. The transverse piezoelectric constant d31 was found to be-4.66 pC/N. Time and frequency responses of the cantilever actuator were investigated by means of a laser Doppler vibrometer. The actuator has a sensitivity of 12 nm/V at 15 kHz. Its 1st bending resonance was observed at 53 kHz. The bandwidth was found to be 27 kHz with damping of 0.35%. The cantilever demonstrated capability of high frequency actuation on a nanometer level.
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Authors: Yu Wen Zhao, Yun Peng Song, Sen Wu, Xing Fu
Abstract: Atomic force microscope (AFM) is widely used to measure nanoforce in the analysis of nanomechanical and biomechanical properties. As the critical factor in the nanoforce measurement, the stiffness of the AFM cantilever must be determined properly. In this paper, an accurate and SI-traceable calibration method is presented to obtain the stiffness of the AFM cantilever in the normal direction. The calibration system consists of a homemade AFM head and an ultra-precision electromagnetic balance. The calibration is based on the Hooke's law i.e. the stiffness is equal to the force divided by the deflection of the cantilever. With this system, three kinds of cantilevers were calibrated. The relative standard deviation is better than 1%. The results of these experiments showed good accuracy and repeatability.
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Authors: Atsumi Ohtsuki
Abstract: This report deals with an innovative method (Own-Weight Cantilever Method) to measure Young’s modulus of flexible thin materials. A newly developed method is based on the large deformation theory considering large deformation behaviors due to own-weight in flexible thin materials. Analytical solutions are derived by using Bessel Functions. By means of measuring the horizontal displacement or the vertical displacement at a free end of a cantilever, Young’s modulus can be easily obtained for various flexible thin and long materials. Measurements were carried out on a piano wire. The results confirm that the new method is suitable for flexible thin wires.
371
Authors: Moones Rahmandoust, Andreas Öchsner
Abstract: In this study, single-walled carbon nanotubes were generated in their perfect state as finite element models in the MSC.Marc software. The buckling behaviour and resonant frequency modes of the two limiting cases of carbon nanotubes, i.e. the armchair and zigzag models, were studied. The obtained results were compared with the classical analytical solutions related to a similar continuum structure of a hollow cylinder. The buckling behaviour of single-walled carbon nanotubes under cantilever boundary conditions proved to be almost identical to the prediction of the classical Euler equation. Furthermore, there was very good agreement between the analytical and finite element results of the studied single-walled carbon nanotubes; though the achieved value of the first mode of frequency, obtained from the finite element results, was more accurate than the higher modes.
153
Authors: Jian An Lv, Zhen Chuan Yang, Gui Zheng Yan, Yong Cai, Bao Shun Zhang, Kevin J. Chen
Abstract: In this article, integrated AlGaN/GaN cantilevers on (111) silicon substrate are fabricated and characterized. The process started with AlGaN/GaN HEMTs fabrication followed by a series of dry-etch-only MEMS process. To characterize the residual stress distribution, Micro-Raman spectroscopy is used and the residual stress in suspended GaN cantilever is found ~ 90% lower after releasing. A type of micro-bending test is used to characterize the piezoresponse of AlGaN/GaN HEMT on the GaN cantilever. An output current modulation greater than 20% can be observed when the cantilever is vertically downward deflected ~ 30 µm.
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Authors: A.W. Khairul Adly, Y. Wahab, A.Y.M. Shakaff, Mazlee Mazalan
Abstract: The ability to self-energize wireless sensor node promote the popularity of energy harvesting technique especially by using ambient vibration as the source of energy. In addition, the successful integration of the energy harvesting element on the same wafer as a wireless sensor node will promote the production in the MEMS scale and will reduce the overall cost of production. The usage of the cantilever structure as the transducer for converting mechanical energy (vibration) due to deflection of cantilever into the electrical energy is possible by depositing piezoelectric material on the cantilever. The usage of cantilever provide the simplest way for fabrication in the MEMS scale and also provide the ability to achieve low natural frequency. This paper present the work done on the simulation of the cantilever structure with the top end and back etch proof mass towards achieving low natural frequency in the MEMS scale by using IntelliSuite software.
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Authors: Jeong Woo Park, Nam Hun Kim
Abstract: Micro/Nanofabrication of silicon substrate based on the atomic force microscope (AFM) followed by wet chemical etching was demonstrated. A specially designed cantilever with a diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional Si or Si3N4-based micro cantilever for scanning. A thin damaged layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip, which was found to be a low crystallized amorphous silicon layer. Hence these sequential processes, called tribo nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool. According to our results, it has been clearly known that the damaged layer withstands against aqueous potassium hydroxide solution, while it dissolves in diluted hydro fluoric (DHF) solution.
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