Papers by Keyword: Capacitance Micrometer

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Authors: Qiang Liu, Ying Xue Yao, L. Zhou
Abstract: Nano-hardness test device has the ability to make the load-displacement measurement with sub-nanometer indentation depth sensitivity, and the nanohardness of the material can be got from the load-displacement curve by Oliver-Pharr method. In order to measure the small displacement accurately, we designed a capacitive displacement measuring system. This capacitance micrometer has a resolution of 0.1nm, and is suitable for our nano-hardness test device.
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