Papers by Keyword: Czochralski Silicon

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Authors: Eddy Simoen, Cor Claeys, V.B. Neimash, A. Kraitchinskii, M. Kras'ko, V. Tischenko, V. Voitovych
367
Authors: N. Inoue, M. Nakatsu, K. Tanahashi, Hiroshi Yamada-Kaneta, Haruhiko Ono, V.D. Akhmetov, O. Lysytskiy, Hans Richter
609
Authors: T. Hallberg, J. Lennart Lindström, Bengt Gunnar Svensson, Krzysztof Swiatek
1239
Authors: Aurimas Uleckas, Eugenijus Gaubas, Joan Marc Rafi, Jiahe Chen, De Ren Yang, Hidenori Ohyama, Eddy Simoen, Jan Vanhellemont
Abstract: Results are presented of a comparative study of diodes processed on n-type Cz grown Si substrates without and with Ge doping concentration of about 1019 cm-3 and 1020 cm-3. In order to investigate thermal donor formation, isothermal annealing at 450°C for 0.5 – 5 h was carried out. As processed diodes were also irradiated with 2 MeV electrons with fluences in the range between 1014 and 1017 e/cm2 to investigate the Ge doping influence on irradiation induced defect formation. Diodes after thermal and radiation treatments have been investigated by combining different techniques.
347
Authors: Panja Luukka, Jaakko Härkönen, Esa Tuovinen, Sandor Czellar, Vladimir Eremin, Zheng Li, Eija Tuominen, Elena Verbitskaya
Abstract: Segmented silicon detectors are widely used in modern high-energy physics (HEP) experiments due to their excellent spatial resolution and well-established manufacturing technology. However, in such experiments the detectors are exposed to high fluences of particle radiation, which causes irreversible crystallographic defects in the silicon material. Since 1990’s, considerable amount of research has gone into improving the radiation hardness of silicon detectors. One very promising approach is to use magnetic Czochralski silicon (MCz-Si) that has been found to be more radiation hard against charged hadrons than traditional Float Zone silicon material (Fz-Si) used in the current HEP applications. Other approaches include operating the devices at cryogenic temperatures and designing special detector structures such as p-type detectors or semi-3D detectors. In order to demonstrate that the developed technologies are suitable for the HEP experiments, it is necessary to extensively characterize the potentially radiation hard detectors. We have an excellent instrument for this, the Cryogenic Transient Current Technique (C-TCT) measurement setup, which is an effective research tool for studying heavily irradiated silicon detectors. With the C-TCT setup it is possible to extract the full depletion voltage, effective trapping time, electric field distribution and the sign of the space charge in the silicon bulk in the temperature range of 45-300 K. This article
207
Authors: F.G. Kirscht, B. Orschel, S. Rouvimov, M. Shabani
367
Authors: Jan Vanhellemont, E. Dornberger, J. Esfandyari, G. Kissinger, M.-A. Trauwaert, H. Bender, D. Gräf, U. Lambert, Wilfried von Ammon
341
Authors: Ling Mao Xu, Chao Gao, Xiang Yang Ma, De Ren Yang
Abstract: Effects of prior rapid thermal processing (RTP) under different atmospheres on the motion of dislocations initiated from indentations in Czochralski (CZ) silicon have been investigated. It is found that the maximum gliding distances of dislocations in the specimens with the prior RTP under nitrogen (N2) atmosphere are much smaller than those in the specimens with the prior RTP under argon (Ar) atmosphere. This is also the case when the specimens received annealing for oxygen precipitation (OP) subsequent to the RTP at 1250 °C under N2 and Ar atmospheres, respectively. It is believed that the nitrogen atoms introduced during the RTP under nitrogen atmosphere or the oxygen precipitates facilitated by the RTP-introduced nitrogen atoms can exhibit pinning effect on the dislocation motion, which increases the critical resolved shear stress for dislocation glide.
238
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