Papers by Keyword: Error Separation

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Authors: Lian Hu Xu, Yi Bao Yuan, Wei Ying Piao
Abstract: The electronic or pneumatic multi-section and multi-probe gauges are widely used for diameter and coaxiality measurements due to their high measurement efficiency in workshops. However, their measurement accuracy is determined mainly by the manufacturing errors of the assembly coaxiality master, therefore, how to establish coaxiality measurement datum reference is the key technology. The physical coaxiality masters are expected to be the impossible "zero error datum reference". The higher manufacturing accuracy of the masters, the more expensive for their manufacturing costs. A novel mathematical method on the basis of error separation principle was proposed in order to separate the manufacturing errors of the master. The basic principle is that the eccentric error of the coaxiality master can be expressed as the first harmonic function and the ideal zero-error datum reference could be established by the mathematical method of two sampling operations in phase difference of 180° in coaxiality master for gauge initialization. This method can be called as "mathematical datum reference" for coaxiality measurement. Experimental results indicate that the coaxiality measurement results of the multi-section and multi-probe gauge by the novel mathematical method coincide with those of the three-coordinate measuring machine and the maximum difference of both is about 0.0014 mm. The new coaxiality measurement principle can separate the datum error of the coaxiality master theoretically and can improve the coaxiality measurement accuracy greatly with the common accuracy coaxiality master.
Authors: Gang Yao, Jian Jun Zhao, Jing Jie Sun
Abstract: According to the error character of the systematic error and random error in calibration data, we put forward using wavelet analysis method to the process of separating error. We give the basic principle and method to dispose random error with Wavelet Analysis. When choosing the threshold, we use GCV(Generalized Cross Validation) principle. Then use IA to search the best value of GCV function and realize the separation simulation of random error in the MATLAB. During the selection operation of IA(Immune Algorithm), the expecting propagation probability is computed in order to guarantee the diversity of the colony and the robustness of algorithm. The results of simulation show that the combination of Wavelet Transform and IA can achieve the aim of separation and have some application prospect in this field.
Authors: Hui Zong Lu, Zhi Wei Wang, Qian Fa Deng, Bing Hai Lv, Fen Fen Zhou, Ju Long Yuan
Abstract: A dual probe non-contact ball roundness measurement method is presented in this paper. With two probes aligned in opposite directions, the direct measurement of diameter variation can be obtained. The relationships between diameter variation and out of roundness of a precision ball are discussed. Attempts of error separation using multiple measurements are carried out and the eccentricity of ball and spindle axis is measured. Measurement results indicated that other than the spindle radial run out, which is synchronous in nature, there also exists high frequency non-synchronous variations. Such non-synchronous errors can be effectively eliminated with the dual probe arrangement for diameter variation measurement. The measurement results showed that such set up is capable of measuring high precision balls for diameter variation and out of roundness with uncertainty of less than 10nm. Single measurement can be completed in 10 seconds with over 10,000 data points. Faster measurement is possible with improved air bearing spindle. The method is suitable for online application of precision ball diameter variation and out of roundness measurement.
Authors: Feng Lu, Hong Bo Shen, Xiao Fei Zhang, Li Xiu Zhang, Yu Hou Wu, Ke Zhang
Abstract: Two-point method designed of the test system for application, the precision of the motorized spindle rotation was dynamic measurements. The system consists of standard bars, high-precision non-contact eddy current sensor. Analyzed by a mathematical model to establish error separation, measurement of two spindle rotation accuracy. The use of two isolated error method for processing the experimental data obtained spindle rotation accuracy at different speeds. Studies have shown that when the spindle speed of 10,000 rpm rotational error is small and tends to be more stable. Identify the factors that affect the accuracy of spindle rotation and summarized. Spindle rotation accuracy on-line monitoring and speed control provides an important theoretical, experimental basis.
Authors: Min Cui, Wei Yi Deng
Abstract: On the foundation of conventional double-flank gear rolling tester, a virtual detector of gear error taking personal computer as the core is developed with the use of virtual instrument technology. Systematic error is analyzed through error separation technique. The structure of the detecting system , the design of the system software based on LabVIEW, and the separation of different radial component deviations of gear are presented.
Authors: Lei Zhang, Yu Zhang, Lin Ba
Abstract: There are some applications of error separation technique in actual measurement. However there exists a series of theoretical and technical obstacles, and the error separation technique lacks the objective assessment. The further discussion about the character of error separation technique by multi-probe method is made in this paper and six criteria for precision measurement of error separation technique by multi-probe method is also advanced. That is, (1) The criterion for veracity of error separation; (2) The criterion for periodicity of combination signal; (3) The criterion for the remnant first-harmonic in combination signal; (4) The criterion for validity of error separation results; (5) The criterion for validity of probes’ fixing angles ; (6) The criterion for nonzero character of weight function. These criteria are significant for the objective evaluation of the measuring apparatus’ measurement precision, the validity of the sampling data, and the confidence level of error separation results. The validity of the measuring condition was proved by the online measurement experiment.
Authors: Mei Yang, Chun Yan Tian, You Quan Chen, Cheng Da Ning
Abstract: Aiming at the low efficiency and precision of nowadays domestic auto-straightening machine of shafts, a new kind of shafts straightness detection system is researched and developed. The supporting part of the measuring mechanism adopts the mechanical structure of auto-going-down of straightening points supporting pedestal. The whole convolute measuring system fixes on the machine tool orbit sliding table, whose movement can change the position for the straightening point and make positioning faster and more accurate. In addition, this detection system bases on applications math and builds math model by Fourier transform which can separate the elliptical error signal, straightness error signal and impulse error signal and then gained ideal straightness error of shafts.
Authors: Zhen Zhong Wang, Yin Biao Guo, Jiang Guo, Qiao Xu
Abstract: In precision measurement, the existed error of measuring system influences surface accuracy more. This paper provides an error analysis focusing on the research effort on aspheric lens on-machine measurement for form accuracy. And the error parameters including positioning error of coordinate origin, tilt angle and radius error of probe head are investigated. It was known that it was quite difficult to obtain the parameters by detecting instruments, so the method of error separation and correction based on measuring standard parts is presented in this paper to guide the inverse solution for higher measuring accuracy. Also, a measuring experiment with Φ210mm lens is executed. Experimental results indicate that the method based on standard parts is suitable for on-machine precision measuring of aspheric lens.
Authors: Yong Meng Liu, Mao Qiang Yuan, Jie Ru Cao, Jing Ma, Jiu Bin Tan
Abstract: To improve the measurement accuracy of two-dimensional (2D) precision working stages in the semiconductor manufacturing industry, an error separation and dynamic compensation method based on a planar grating is proposed for a 2D coplanar displacement measurement system. In the system, a planar grating of HEIDENHAIN PP281R is fixed in the center of precision working stage to build coplanar structure and reduce Abbe errors. And the system errors including grating period carved error, temperature effect, vibration effect and mount effect are modeled, calculated and separated. Then the separated errors are dynamically compensated from the corresponding displacement measurement results through data-processing software. Analysis results show that the proposed error separation and dynamic compensation method based on planar grating can improve the measurement accuracy of the coplanar displacement measurement system effectively.
Authors: Shu Jie Liu, K. Watanabe, Satoru Takahashi, Kiyoshi Takamasu
Abstract: In the semiconductor industry, a device that can measure the surface-profile of photoresist is needed. Since the photoresist surface is very smooth and deformable, the device is required to measure vertical direction with nanometer resolution and not to damage it at the measurement. We developed the apparatus using multi-cantilever and white light interferometer to measure the surface-profile of thin film. But, this system with scanning method suffers from the presence of moving stage and systematic sensor errors. So, in this paper, an error separation approach used coupled distance sensors, together with an autocollimator as an additional angle measuring device, was consulted the potentiality for self-calibration of multi-cantilever. Then, according to this method, we constructed the experimental apparatus and do the measurement on the resist film. The results demonstrated the feasibility that the constructed multi-ball-cantilever AFM system combined with an autocollimator could measure the thin film with high accuracy.
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