Papers by Keyword: Measurement of Micro-Cavity

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Authors: Ji Wen Cui, Jiu Bin Tan, Q. Shi
Abstract: In order to improve the measurement precision, an improved MAP algorithm is proposed to increase the edge aiming precision in this paper. The algorithm breaks the limitation of degenerated model, takes two actual factors into account, one is the distortion caused by motion, which solved by Huber-Markov random filed in the improved MAP algorithm, and the other is curvature of field, which solved by Delaunay triangle method. The algorithm can restore the high-frequency information of image, keep the edge character of image, and increase the aiming precision of the edge during the measurement. The experiments show that the uncertainty of location for the image captured in the measurement can be improved three folds, and the repeatability uncertain is less then 0.8µm when the diameter of φ0.2mm hole is measured using the proposed MAP algorithm and length-measuring interferometer together.
Authors: Ji Wen Cui, Chuan Xi Song, Jiu Bin Tan
Abstract: In order to measure the geometric dimension of a micro-cavity, a touch-trigger measurement method is proposed, in which the light coming from the incident optical fiber is transmitted in the reversal direction via the optical fiber coupling into the effluent optical fiber, the lateral displacement of the touch-trigger sensor is transformed into the deflexion of light coming out from the effluent optical fiber, and the deflexion is transformed into an image signal by the object lens and CCD capturing system. The effectiveness of the proposed method is verified by experiments. Experimental results indicate that the proposed method can be used to measure the geometric dimension of a micro-cavity. A blind hole of 1.5 mm deep and about 0.2 mm in diameter is measured with the touch-trigger sensor and self-developed micro-hole diameter measuring machine with a repeatability uncertainty of less than 0.2 m.
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