Papers by Keyword: Oscillation Loop

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Authors: Chul Hyun, Jang Gyu Lee, Tae Sam Kang
Abstract: This paper presents a surface micro-machined differential resonant accelerometer (DRXL) by using the epitaxially grown thick polysilicon process. The proposed DRXL utilizes the electrostatic stiffness changing effect of an electrostatic torsional actuator. This device produces a differential digital output proportional to an applied acceleration. For a self-generated and self-sustained oscillation of the resonator, a feedback oscillation loop is designed, implemented, and applied to the DRXL chip. The oscillation loop is designed using an analytical result based on the describing function method. Using the implemented self-sustaining oscillation loop, pecifications of sensor performance are obtained by various performance tests. These results show quite an improved quality factor and resolution compared to that of the sensing device only. And we obtained more stable output frequency responses.
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Authors: Chul Hyun, Jang Gyu Lee, Tae Sam Kang
Abstract: This paper presents an oscillation loop for an INS (Inertial Navigation System) grade, surface micro-machined resonant type accelerometer. This resonant type sensor utilizes the electrostatic stiffness changing effect of an electrostatic actuator. This device produces a frequency output upon an applied acceleration. A closed loop system called self-sustained oscillation loop is prerequisite for its operation as a resonant accelerometer. A self-sustained oscillation loop induces the system’s dynamic states into its primary mode, thus keeps track of its resonant state under applied acceleration or perturbation. For this, a simple self-sustained oscillation loop is designed and the feature of the loop is analyzed in the viewpoint of nonlinear dynamic system. From the standpoint of feedback control system, both determination of resonance point and its stability analysis are required. In the actual system, which has several noise sources, noise can affect the output resonant frequency. We analyzed the effect of a noise on oscillation frequency. Finally, simulation and experimental result is given
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