Papers by Keyword: Resonator

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Authors: Zhen Yu Li, Hong Sheng Li
Abstract: Plasma Chemical Vapor Deposition ( PCVD ) is an important application in making optical fiber core rod. The resonator is the key part for PCVD application. But the existing resonator have several serious disadvantages: its working is not stable; the size of deposited substrate tube is small(Ø31mm); the deposition rate is low(2.5g/min) and the deposition effect is unsymmetrical; the fabrication of the resonator is very difficult and expensive. Therefore, a new type of resonator, a cylinder resonator, is designed to overcome the above disadvantages. The cylinder resonator supports bigger substrate tube (Max Ø60mm) and higher deposition rate(3.2g/min) than existing ones, while its working is also more stable. Since the structure is more simple, the fabrication is easier and cheaper. The corresponding microwave theoretical method of the new resonator designing is also introduced with the necessary computer simulation, as well as test running. And TE111 mode microwave is the Fundamental Mode of the cylinder resonator. The cylinder resonator has been applied in normal production for 4 years, which is better for bigger size core rod making, improving the optical fiber quality and saving cost. It is estimated, after modification with the cylinder resonator and 10kW microwave generator, a PCVD lathe can yield 30% more rods than before.
Authors: Nan Wang, Fu Li Hsiao, Moorthi Palaniapan, Ming Lin Julius Tsai, Jeffrey B.W. Soon, Dim Lee Kwong, Cheng Kuo Lee
Abstract: Two-dimensional (2-D) Silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10μm thick free-standing silicon plate with line defects is characterized as a cavity-mode PnC resonator. Piezoelectric aluminum nitride (AlN) film is deployed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite element method (FEM). The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1,000 at its resonant frequency of 152.46MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for RF communications and sensing applications.
Authors: Venkatesh Chenniappan, Reza Moheimani, Mehmet Yuce
Abstract: A novel MEMS resonator employing “capacitance-shaping” principle to generate sinusoidal signals is proposed. FEM simulations are done to study the structure. Preliminary characterizations on devices fabricated through SOI-MUMPS are carried-out to study the frequency tuning of the resonator by electrostatic actuation. Variants of the proposed structure are presented. Second order dynamical models of the devices are derived.
Authors: Volker Cimalla, C. C. Röhlig, V. Lebedev, Oliver Ambacher, Katja Tonisch, Florentina Niebelschütz, Klemens Brueckner, Matthias A. Hein
Abstract: With the increasing requirements for microelectromechanical systems (MEMS) regarding stability, miniaturization and integration, novel materials such as wide band gap semiconductors are receiving more attention. The outstanding properties of group III-nitrides offer many more possibilities for the implementation of new functionalities and a variety of technologies are available to realize group III-nitride based MEMS. In this work we demonstrate the application of these techniques for the fabrication of full-nitride MEMS. It includes a novel actuation and sensing principle based on the piezoelectric effect and employing a two-dimensional electron gas confined in AlGaN/GaN heterostructures as integrated back electrode. Furthermore, the actuation of flexural and longitudinal vibration modes in resonator bridges are demonstrated as well as their sensing properties.
Authors: Yong Peng Tai, Pu Li, Wan Li Zuo
Abstract: In this paper, we present an analytical model for thermoelastic damping (TED) in micromechanical resonators, which is based on entropy generation, a thermodynamic parameter measuring the irreversibility in heat conduction. The temperature field of thin beam with small vibration is obtained by solving governing equations of linear thermoelasticity. The analytical solution is derived from the entropy generation equation. This method of entropy generation can provide an accurate estimation of the quality factor in flexural resonators. The results are compared with Zener’s approximation and LR (Lifshitz and Roukes) method. It is shown that the analytical model described in this paper is valid to estimate the quality factor due to thermoelastic damping.
Authors: Maisarah Abu, Nur Asyrani Mohd Asari, Khairul Nabilah Zainul Ariffin, Nurul Najwa Md Yusof, Eryana Eiyda Hussin
Abstract: This paper presented a new design of bendable hexagonal resonator for chipless RFID tag. A linearly polarized plane wave and Radar Cross Section (RCS) probes were used in simulation set-up. The optimized resonator was fabricated on a thin fast-film substrate with dielectric constant, εr=2.7 and substrate thickness, t = 0.13 mm. The fabricated resonator consisted of 3 hexagonal slots which represented three bit 1s. The measurement was performed to validate the designed resonator. It was measured using two transmitting and receiving horn antennas along with the network analyzer. The measured magnitudes were-24.292 dB, -28.854 dB and-32.234 dB.
Authors: Jian Qiang Han, Xiao Fei Wang, Ri Sheng Feng
Abstract: Microbridge resonators have been widely used as sensing elements to measure various parameters, such as pressure, acceleration, biochemical adsorption and reactions, mass-flow, infrared ray et al. But no model has been built to calculate quantitatively the shift of resonance frequency due to heat convection, incident infrared ray, excited thermal power drift and ambient air pressure. In this paper, a theoretical analysis is given to calculate the resonance frequency shift due to the thermal power (static heating power and dynamic heating power) fluctuation and the added mass of the ambient air. The model can be used to design resonant sensors based on microbridge resonator, such as resonant mass-flow sensors, resonant IR detectors, resonant biochemical sensors and resonant vacuum gauge, et al.
Authors: Yi Lun Zhu, S.R. Wang, A.P. Qiu
Abstract: The principle of operation of double-ended resonant tuning forks (DETF) is described in this paper. A new kind of DETF used in the resonant gyroscope is proposed. Considering the feasibility of fabrication, the dimensions are optimized. The variation of the natural frequency against the force applied to one end of the DETF is discussed. The relation between the driving modal frequency of resonant gyroscope and the driving modal frequency of DETF is analyzed.
Authors: Neda Kazemy Najafabadi, Sare Nemati, Massoud Dousti
Abstract: The S band limits from 2 to 4 GHz, is part of the electromagnetic spectrum’s microwave band. It is used by radars, satellites and some communications. This paper is concerned with the theory and design of 3 GHz feedback type and negative resistance oscillators by using Aiglent ADS software simulator with GaAs ED02AH 0.2-μm technology, and comparison of their results. A lumped element resonator has used in the design of feedback type oscillator and a negative resistance oscillator has utilized a microstrip resonator. The negative resistance oscillator operates at 3.072 GHz with phase noise levels at -99.49 dBc/Hz and -119.6 dBc/Hz at 100KHz and 1 MHz offset frequencies respectively. The phase noise levels of feedback type oscillator are -83.30 dBc/Hz and -103.3 dBc/Hz at 100KHz and 1 MHz offset at oscillation frequency of 3 GHz. Furthermore, we compared the output power of these oscillators and negative resistance oscillator showed 7.124 dBm, and feedback type oscillator presented -10.707dBm.
Authors: Asif Mirza, Nor Hisham Hamid, Mohd Haris Md Khir, Khalid Ashraf, M.T. Jan, Kashif Riaz
Abstract: This paper reports design, modeling and simulation of MEMS based sensor working in dynamic mode with fully differential piezoresistive sensing for monitoring the concentration of exhaled carbon dioxide (CO2) gas in human breath called capnometer. CO2 being a very important biomarker, it is desirable to extend the scope of its monitoring beyond clinical use to home and ambulatory services. Currently the scope of capnometers and its adaption is limited by high cost, large size and high power consumption of conventional capnometers . In recent years, MEMS based micro resonant sensors have received considerable attention due to their potential as a platform for the development of many novel physical, chemical, and biological sensors with small size, low cost and low power requirements. The sensor is designed using 0.35 micron CMOS technology. CoventorWare and MATLAB have been used as simulation software. According to the developed model and simulation results the resonator has resonant frequency 57393 Hz and mass sensitivity of 3.2 Hz/ng. The results show that the longitudinal relative change of resistance is 0.24%/µm while the transverse relative change of resistance is -0.03%/µm.
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