Papers by Keyword: RF Magnetron Sputtering

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Authors: M.F. Achoi, Mohd Nor Asiah, Mohamad Rusop, Saifollah Abdullah
Abstract: TiO2 nanocoated mild steel surface has been successfully prepared via 100 watt of RF magnetron sputtering by using TiO2 target and sputtering condition was performed in 80sccm argon gas. The studied was done in comparing the surface properties of TiO2 nanocoated mild steel between short term and long term sputtering time at 5 and 60 minutes, respectively. From the results, we have found that the long-term sputtering time producing good surface coating with lower surface roughness at 0.033 nm with thickness in nanometer scale is 169 nm via AFM. Through Auger study revealed that the coating attributed Ti and O elements at energy of 383.48 eV and 483.44 eV, respectively. It was also showed that the intensity of that element high at about 100k a.u. in long-term compared to 55k a.u. short-term of sputtering time. It is thus showed that producing coating depends upon manipulation of parameter in RF magnetron sputtering.
Authors: Joop G.C. Wolke, E. Vandenbulcke, B. van Oirschot, John A. Jansen
Abstract: The RF magnetron sputter technique was used to deposit Bioglass (BG) and hydroxyapatite (HA) coatings onto titanium substrates. In the current study, the physico-chemical and dissolution properties of various deposited coatings were investigated. X-ray diffraction demonstrated that the as-sputtered coatings had an amorphous structure, a heattreatment for 2 hours at 600°C changed only the HA coating into a crystalline apatite structure. Dissolution experiments demonstrated that all the amorphous coatings dissolved during the incubation for 4 weeks in simulated body fluid, while all the heattreated sputter coatings were still maintained. In contrast with the HA heattreated sputter coatings all the bioglass containing sputter coatings showed the formation of a crystalline apatite phase. Scanning electron microscopical examination of the sputtered coatings demonstrated that on all the heattreated BG/HG sputter coating a thick CaP precipitate was formed, while on the BG sputter coating occasionally a globular precipitate was observed.
Authors: Juan Zuo
Abstract: Large-scale uniform Ag@TiO2 films was prepared by RF magnetron sputtering in pure Ar plasma using polycrystalline TiO2 semiconductor sintered target. The effect of annealing on the photochromic properties was studied to obtain a better understanding of the interaction of the structure. Ultraviolet-visible absorption and scanning electron microscopy were performed to investigate the possibility of tailoring the structure with consequent modification of the optical properties. Ag nanoparticles were formed between TiO2 films after annealing the samples with Ag film structure. The annealed Ag@TiO2 films present a photochromic property in comparison with the as-prepared samples. Such nanocomposite films can be used as smart windows, high density multiwavelength optical memory and rewritable electronic paper.
Authors: Kyung Chul Lee, Nam Ho Kim, B.H. O, Hyoun Woo Kim
Abstract: We have investigated the effect of annealing temperature on the structural property of Au thin films deposited on Si(100) substrate using the radio frequency (RF) magnetron sputtering technique. X-ray diffraction revealed that the relative intensities and FWHM of (111), (200), and (311) peaks increased and decreased, respectively, after thermal annealing at 600°C. Scanning electron microscopy indicated that after annealing at 600-700°C, Au structures agglomerated on Si(100) surfaces. Energy dispersive x-ray spectrometry (EDX) revealed that the agglomerated structure was composed of pure Au.
Authors: Hui Jun Zhang, Ting Shan Liu, Jing Liang Cheng, Dian Zhong Wen, Akimitsu Hatta
Abstract: In order to study Antibacterial properties of nanometer TiO2 thin films, nanometer M3+-TiO2 films have been prepared on glass by RF magnetron co-sputtering method. The films were characterized by SEM, XRD, and AFM. The influence of Fe, Sb elements and calcination temperature on the films structure was investigated. The bactericidal activity for the bacteria cells was estimated by relative number of bacteria survived calculated from the number of viable cells which from colonies on the nutrient agar plates. The nanometer M3+-TiO2 thin films exhibited a high antibacterial activity, which was enhanced with the increase of the temperature of thermal treatment and formation of anatase crystalline structure.
Authors: Liang Tang Zhang, Jie Song, Quan Feng Dong, Sun Tao Wu
Abstract: The polycrystalline V2O5 films as the anode in V2O5 /LiPON /LiCoO2 lithium microbattary were prepared by RF magnetron sputtering system. The V2O5 films’ crystal structures, surface morphologies and composition were characterized and analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The microbatteries were fabricated by micro electro-mechanical system (MEMS) technology. The battery active unit area is 500μm×500μm, and the thickness of V2O5, LiPON and LiCoO2 films was estimated to be 200, 610, and 220nm, respectively. The discharge volumetric capacity is between 9.36μAhcm-2μm-1 and 9.63μAhcm-2μm-1 after 40 cycles.
Authors: Ming Jer Jeng, Wen Kai Lei, Wei Lun Ku, Liann Be Chang, Ching Wen Wu, Yong Tian Lu, Sung Cheng Hu
Abstract: Molybdenum (Mo) thin films were deposited on soda-lime glass substrate by using RF magnetron sputtering. As is well known, base pressure in sputtering is a processing parameter for preparing high quality Mo films, in addition to RF power and working pressure. The structure, surface roughness and electrical resistivity of Mo thin films were investigated at three base pressures of 1.8×10-7, 5.8×10-7and 2.7×10-6 torr. Experimental results indicate that the Mo films deposited at a low base pressure of 1.8×10-7 torr exhibit a low electrical resistivity of 8.910-6 –cm, a low root mean square value of roughness of 4.92nm and a stronger peak intensity of (110) plane than that of the other two pressures. This finding suggests that Mo films sputtered at a low base pressure have higher crystallinity, larger grain size, smoother surface morphology and lower electrical resistivity than those sputtered at a high base pressure.
Authors: Jian Ping Yang, Xing Ao Li, An You Zuo, Zuo Bin Yuan, Zhu Lin Weng
Abstract: Bi4Ti3O12 (BTO) and Bi3.25La0.75Ti3O12 (BLT) ferroelectric thin films were deposited on Pt/Si substrates by RF magnetron sputtering with Bi4Ti3O12 (BTO) and Bi3.25La0.75Ti3O12 (BLT) targets with 50-mm diameter and 5-mm thickness. The microstructure and ferroelectric properties of thin films were investigated. The grain growth behavior and ferroelectric properties such as remanent polarization were different in these two kinds of film, the effects of La doping in the BLT thin film were very obvious.
Authors: Xing Ao Li, Zu Li Liu, An You Zuo, Zuo Bin Yuan, Jian Ping Yang, Kai Lun Yao
Abstract: Bi4-xLaxTi3O12 (BLT) ferroelectric thin films were deposited on Pt/Si substrates by RF magnetron sputtering with Bi4-xLaxTi3O12 (x=0.5, 0.75, 1) targets with 50-mm diameter and 5-mm thickness. The effects of La contents on microstructure and ferroelectric properties of Bi4-xLaxTi3O12 thin films were investigated. The grain growth behavior and ferroelectric properties such as remanent polarization were found to be dependent on the La contents in the BLT thin films.
Authors: Takayuki Narushima, Kyosuke Ueda, Takashi Goto, Jun Kurihara, Hiroshi Kawamura
Abstract: Oxyapatite, amorphous calcium phosphate, and double-layered calcium phosphate coating films were fabricated on mirror-polished commercially pure titanium (CP Ti) and blasted Ti-6Al-4V alloy substrates by radiofrequency (RF) magnetron sputtering; the properties of these films were evaluated in vivo and in vitro. The bonding strength between the calcium phosphate films and the Ti substrates was higher than 50 MPa. This value is higher than the bonding strength reported in the case of plasma-sprayed calcium phosphate coating films fabricated on Ti substrates. The removal torque of screw-type blasted Ti-6Al-4V alloy implants in the femurs of Japanese white rabbits increased with the duration of implantation, and the removal torque values of the coated implants was observed to be higher than those of the non-coated implants. In vitro and in vivo studies indicate that coating Ti implants with calcium phosphate films using RF magnetron sputtering is effective in improving the bone compatibility of Ti implants. Finally, the factors that should be considered in fabricating biomedical coating films were discussed.
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