Papers by Keyword: Rubber Membrane

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Authors: Qiang Li, Deng Feng Xu, Jin Chun Hu, Liu Hao
Abstract: Magnetic suspension vibration isolators have attracted significant attention in the field of semiconductor industry and high precision equipments. However, it is impossible to levitate an object by only permanent magnet due to instability of permanent magnets. It needs a guide device or active control to hold the magnetic suspension passive vibration isolator (MSPVI) at equilibrium position. In order to overcome the instability of the permanent magnets, the linear bearing, rubber O-ring and rubber membrane are applied in the MSPVI. The transmissibility of the MSPVI was calculated and subsequently measured. The experimental results show that the MSPVI can achieve low natural frequency with the help of the rubber membrane which is superior to the linear bearing and o-ring. Beside, the vibration isolating performance of the MSPVI is measured. The experimental results reveal that the MSPVI achieves the lowest resonant frequency when the load capacity of the MSPVI reaches maximum value.
Authors: Seung Woo Han, Ki Jeong Seo, Jae Jong Lee, Seung Woo Lee, Hak Joo Lee, Jung Yup Kim
Abstract: Nanoimprint lithography is a promising technology to produce sub-100 nm scale features on silicon chips. One of key issues in the nanoimprint lithography is how to make uniform contact between the stamp and the substrate on a large area. In this study a rubber membrane unit under substrate is introduced to resolve this problem. Two layers of membrane were designed to consider air flow in the middle of resist on a silicon wafer. The geometry design for accomplishing uniform contact was carried out using finite element analysis. The material modeling of hyperelastic properties of rubber is characterized by the Mooney-Rivlin strain energy functions. Material constants in the strain energy functions are able to be determined via the curve fitting of experimental stress-strain data. Simple tension and equi-biaxial tests were performed to determine the material constants. To evaluate the effects of a rubber membrane unit, nanoimprint lithography process with it was executed. We could confirm that a distinct improvement of uniform contact was shown and air flow problem was solved during the process.
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