Papers by Keyword: Ultra-Smooth Surface

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Authors: Mo Yang, Zhong Da Guo, Zhi Qiang Yang
Abstract: This paper puts forward a kind of magnetorheological polishing technology of arbitrary curvature radius spherical optical parts and the mechanical structure of its supporting equipment. By changing the position of the intersection point of the spindle unit and pendulum shaft device in the space, it can achieve high quality and rapid processing of an arbitrary curvature radius of the spherical optical parts. The wheel-head structure of our equipment is an endless belt structure. The magnetorheological fluids are added to the endless belt, and the wheel-head structure 15 is powered. Then, it will form a Bingham on the endless belt with which the surface of the processed optical parts contact. At last, it will achieve precision flexible polishing process ultimately. A simple mechanical structure design and breakthrough processing method are used in the equipment and the complete processing technology, which can achieve flexible polishing of large-diameter spherical (or plane) optical components with any radius. The machining accuracy is less than 1nm, achieving the requirements of the ultra-smooth surface.
Authors: Tian Zhu Liang, Shou Ping Qu
Abstract: With the increasing rotational speed of the aero-engine shaft and ultra-precision machine tool spindles, there has been the machine tool spindle with ten thousand Rpm. It demands that the spindles should have high rotational accuracy and ultra-smooth surface. In this paper, it takes use of the new ice tool polishing technology to polish metal cylindrical surfaces. The 3D model has been designed. And also the model has been analyzed by Recurdyn software. It verified that the experiment is feasible and effective.
Authors: Ke Hua Zhang, Guo Feng Wang
Abstract: Development of ultra-smooth surface processing technology has great effect on the frontier technologies and defense industry, this attracts many countries to invest and highlight the research works related to ultra-smooth surface abrasive flow polishing technology. This paper gives a global review on the functional effect of ultra-Smooth surface abrasive flow polishing technology on the modern industry. Recent research achievements and machining accuracy developed by several famous universities were introduced and the principle and structure of the machining device were explained, according to the new demands for the future, the tendency of ultra-smooth surface abrasive flow polishing technology was suggested, especial emphasis on the precise polishing tool and the technology of soft contact between abrasive and workpiece.
Authors: Xiao Zong Song, Fei Hu Zhang
Abstract: In this work, optical K9 glass surface has been flattened by nanoparticle colloid jet machining, which is an ultra-smooth surface processing technique utilizing surface chemical effect between work surface atoms and nanoparticles in alkaline colloid to remove the uppermost surface atoms. The surface removal process of nanoparticle colloid jet machining has been investigated through K9 glass polish experiments. And the characterizations of ultra-smooth K9 glass surface polished by nanoparticle colloid jet machining have also been studied in this paper. Surface profiler and atomic force microscopy (AFM) are used to observe the surface microscopic morphological characteristics of K9 glass sample before and after polishing by nanoparticle colloid jet machining. The measurement results of processed surface prove that the primary scratches on the original surface have been completely wiped off by nanoparticle colloid jet machining and the roughness of the K9 glass surface has been improved to be less than 1 nm (Rq). Autocovariance (ACF) is investigated along a cross section of the K9 glass surface to determine the dominant spatial frequencies. The ACF curves show that the surface morphology of K9 glass processed by nanoparticle colloid jet machining is completely different from the preprocessed surface. The final K9 glass surface has been flattened by nanoparticle colloid jet machining. The microscopic morphological profile of the final K9 glass surface becomes increasingly smooth and eventually close to a flat state.
Authors: G.Q. Pan, Z.W. Wang, Dong Hui Wen
Abstract: This paper give some literatures for the technology of fluid polishing. Methods of fluid polishing using for optics curved surface, ultra-smooth plane and inner surface of non-circular curved surface. Each method is explained by above classifications, and some domestic cases which can produce ultra-smooth surface in different conditions, parts and technical parameters is listed and evaluated.
Authors: Ju Fan Zhang, Bo Wang, Shen Dong
Abstract: As there are always certain defects on the final surface of large-scale lightweight mirrors, which are formed in traditional mechanical polishing process, such as microcracks, lattice disturbances, plastic deformation, and so on, an atmospheric pressure plasma polishing method is a good solution to this problem. As a key component, the design of the capacitance coupling atmospheric pressure radio-frequency plasma torch is introduced. The designed torch uses water cooled coaxial aluminium electrodes with special treatment to avoid arcing between them. In normal machining process, the mixture of reaction gas and plasma gas with optimum ratio is input into the plasma torch. Then, excited by radio-frequency power, reaction gas is ionized in the plasma so as to create high density and energy reactive radicals under atmospheric pressure. The radicals cause chemical reactions with the atoms on the part surface, which performs an effective atomscale removal process. As the machining process is chemical in nature, this method avoids surface/subsurface defects mentioned above. Furthermore, initial experiment data analysis has proved that the atmospheric pressure plasma polishing method is effective and reliable, as well as demonstrates the validity of the designed plasma torch.
Authors: Gang Xiang Hu, Xiao Dong Hu, Yang Fu Jin, Xiao Zhen Hu, W. Li
Abstract: The functional materials such as sapphire, silicon wafer etc. are processed efficiently with ultra-smooth surface for the demand of the rapid development of the IC industry. The precise double sided polishing process is one of the main methods of getting the ultra-smooth surface for these materials. This paper introduces the structure and characteristic of the precise double sided polishing machine with a precise pressure control system equipped a new type electro-pneumatic digital servo valve. The works, such as machine design, development of the control system and optimization of process parameters etc. are carried out to meet the requirement of the precise double sided polishing machining process. This equipment has the characteristic of high machining precision and precise control capability, so it can be applied to the ultra-precise machining of the ultra-thin sapphire, silicon wafers etc.
Authors: Shou Ping Qu, Tian Zhu Liang
Abstract: In the paper, the new machining process which was named non-abrasive cryogenic polishing will be introduced. The model of non-abrasive cryogenic polishing was set up. The dynamic simulation was analyzed by using Recurdyn. And the physical model was accomplished. By analyzing mass experiments, the ice tool material, metal material, rotate speed, polishing time and other parameters were found.
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