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Microstructure and Hardness of Ti-Si-C-N Coatings

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Abstract:

Series Ti-Si-C-N coatings with different carbon were deposited on a high-speed-steel substrate by means of pulsed direct current plasma enhanced chemical vapor deposition (PECVD). The structure and hardness were subsequently investigated using X-ray diffraction, transmission electron microscopy and microindentation measurements. It was found that the carbon content had a profound effect on the microstructure and hardness of the Ti-Si-C-N coatings. The results indicated that these coatings consisted of the dominant nanocrystalline Ti(C, N), accompanying with a small amount of silicide (TiSi2, Si3N4 or SiC) dispersed within the dominant phase. An increase in C content resulted in the decrease in the grain size and the increase in fcc-structure lattice parameter. A maximum hardness of 48 GPa was achieved for a two-phase {Ti (C N) + SiC} structure at the C content of 38.6 at.%.

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Periodical:

Key Engineering Materials (Volumes 373-374)

Pages:

188-191

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.373-374.188

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Online since:

March 2008

Authors:

Yan Guo, Sheng Li Ma, Ke Wei Xu, Thomas Bell, Xiao Ying Li, Han Shan Dong

Keywords:

Hardness, Microstructure, PECVD, Ti-Si-C-N-Coating

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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