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Cu(In,Ga)Se2 Prepared by a 2 and 3-Stage Hybrid RF-Magnetron Sputtering and Se Evaporation Method: Properties and Solar Cell Performance

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Abstract:

The potential of RF-magnetron sputtering to achieve high quality Cu(In,Ga)Se2 (CIGS) thin films and efficient solar cells with the goal of using a single technique for all solar cell processing steps is explored. The end point detection method was adapted to RF-magnetron deposition of CIGS in two- or three stages sputtering process. It allows the control of the final composition of the deposited layers in a reproducible way. The influence of substrate temperature and Ar pressure during the deposition on the surface and crossectional morphology of CIGS films was studied for two and three-stage sputtering process sequence. The solar cells prepared with films deposited by two-stage sputtering nave showed a better performance with maximum efficiency above 8 %.

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Advanced Materials Forum III View Preview

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Periodical:

Materials Science Forum (Volumes 514-516)

Pages:

93-97

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.514-516.93

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Online since:

May 2006

Authors:

António F. da Cunha, F. Kurdzesau, Pedro M.P. Salomé

Keywords:

CIGS, Hybrid RF Magnetron Sputtering, Solar Cell

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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