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Surface Behaviors of ELID Ground Engineering Ceramics
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In-Process Electrolytic Dressing Lapping (IEDL) of Al2O3-BN Machinable Ceramics
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Fabrication of SiCN MEMS by UV Lithography of Polysilazane
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In-Process Electrolytic Dressing Lapping (IEDL) of Al2O3-BN Machinable Ceramics

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Periodical:

Key Engineering Materials (Volumes 336-338)

Pages:

1473-1476

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.336-338.1473

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Online since:

April 2007

Authors:

Eun Sang Lee, Y.J. Chun, J.Y. Jang, Myeong Woo Cho, Won Seung Cho, J.H. Lee

Keywords:

Al2O3-BN, Diamond Lapping Wheel, In-Process Electrolytic Dressing Lapping (IEDL), Machinable Ceramics, Surface Roughness (SR)

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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References

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