Microwave Dielectric Property of Porous Silicon Nitride Ceramics

Jun Qi Li; Fa Luo; Dong Mei Zhu; Wan Cheng Zhou

doi:10.4028/www.scientific.net/KEM.336-338.307

Paper Titles

Preparation and Microwave Dielectric Properties of (1-x)Ca_2/5Sm_2/5TiO₃ -x Li_1/2Nd_1/2TiO₃ Ceramics
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Effect of ZnO-V₂O₅ Co-Doping on Phase Stability and Microwave Dielectric Properties of ZnTiO₃ Ceramics
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Effect of V₂O₅ Addition on the Microwave Dielectric Properties of Ba(Mg_1/3Nb_2/3)O₃ Ceramics
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Structure and Dielectric Properties of Citrate Sol-Gel Derived Microwave Ceramics in CaO-ZnO-TiO₂ System
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Microwave Dielectric Property of Porous Silicon Nitride Ceramics
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Preparation and Microwave Permittivity of SiC-AlN Solid Solution Powders
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Properties of Silicon Nitride Using Cordierite as Sintering Additives
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Research on Sintering Dynamics and Microwave Dielectric Properties of Bi and Mn Doped Lead-Based Ceramics
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A Piezoelectric Actuator for Transporting Living Cells
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Microwave Dielectric Property of Porous Silicon Nitride Ceramics

Abstract:

This paper presents the microwave dielectric property of porous silicon nitride ceramics at a frequency of 9360 MHz, which were fabricated by the nitridation of silicon powder. The porous ceramics with different volume fraction of porosity from 18.6% to 56.2% were produced by adding different amount of the pore-forming agent into the initial silicon powder. Microstructural analysis revealed a dense matrix containing large pores and cavities with needle-shaped and flaky β-Si3N4 grains distributing in it. The results showed that the dielectric constant of the ceramics reduces with the porosity increases. With the addition of α-Si3N4 powder in the raw silicon powder, the nitridation rate is raised, and the dielectric constant and the dielectric loss of the ceramics decrease notablely.