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Near-Infrared Light Emission from of Er-Doped ZnO Thin Film in Micropits Processed on Si Substrate

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Abstract:

We have obtained Er-doped ZnO thin film in a micropattern of reverse trapezoids processed on Si substrate by sputtering and ultrafine polishing techniques. Near-infrared light emission was detected successfully from the thin film filling a single micropit with 10 μm square. Transmission electron microscopy (TEM) observation showed epitaxial growth of ZnO crystals along the curvature of the micropit.

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Periodical:

Key Engineering Materials (Volume 320)

Pages:

113-116

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.320.113

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Online since:

September 2006

Authors:

Shigeru Tanaka, Yukari Ishikawa, Naoki Ohashi, Junichi Niitsuma, Takashi Sekiguchi, Noriyoshi Shibata

Keywords:

Cathodoluminescence, Erbium, Infrared, Micro-Array, Photoluminescence (PL), Thin Film, Zinc Oxide (ZnO)

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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References

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