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Surface Roughness Measurement by Using Interferometer and Active Interferometer Stabilization

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Abstract:

The profile of the mirror surface is measured by using optical phase shift method and Twymann-Green interferometer. Phase map is calculated by applying 4–buckets method and Vikhagen phase shift algorithm is applied to escape convolution errors. From that the obtained roughness of the mirror surface is around 20 nm rms roughness value. Also, the interferometer was stabilized by using fringe locking method. Also, we propose two colors method very precise surface profile and the length can be measured in the harsh environmental conditions.

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Periodical:

Key Engineering Materials (Volumes 321-323)

Pages:

99-102

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.321-323.99

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Online since:

October 2006

Authors:

Jin Tae Kim, Dohyoung Kim, Hyun Su Kim, Jong Rak Park

Keywords:

Interferometer, Laser, Phase Shifting, Stabilisation, Surface Profile

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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