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Design and Fabrication of a Flexural Plate Wave Accelerometer

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Abstract:

We design and fabricate a novel flexural plate wave (FPW) accelerometer which has wide working range and improved sensitivity. A bridge as well as a rectangular diaphragm with a proof mass has been considered for a wave propagation medium to enhance the performance. The performance improvement is also verified with the bridge structure and the existence of the proof mass in the simulation results.

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Periodical:

Key Engineering Materials (Volumes 326-328)

Pages:

241-244

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.326-328.241

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Online since:

December 2006

Authors:

Jin Seung Lee, Yong Chul Kim, Woon Seob Lee, Seung Seob Lee

Keywords:

Accelerometer, Acoustic Wave, FPW, Inertial Sensor

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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References

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