Paper Titles
Measurement of Mechanical Properties and Residual Stresses of Bridged Gold Films and Circular Gold Membranes
p.227
An Experimental Method for Micro-Scale Uniaxial Tension Test
p.233
Measuring Strains for Hematite Phase in Sinter Ore by Electron Backscattering Diffraction Method
p.237
Design and Fabrication of a Flexural Plate Wave Accelerometer
p.241
A Novel PDMS Valveless Micropump with a Circular Lightweight Piezo-Composite Actuator
p.245
Design and Performance Test of Digital Rebalance Loop for MEMS Gyroscope
p.249
Dielectrophoresis of Microparticles with Planar Microelectrode Systems
p.253
Fine Micro Patterning of Conductive Line by Using Direct Inkjet Printing
p.257
Micro-Deformation Measurement on a Specular Surface by DIC with Nanoparticles
p.261

A Novel PDMS Valveless Micropump with a Circular Lightweight Piezo-Composite Actuator

Article Preview

Abstract:

This paper presents a design and performance evaluation of a valveless micropump fabricated from polydimethylsiloxane (PDMS) based on molding techniques. A circular lightweight piezo-composite actuator (LIPCA) was successfully developed for the actuating diaphragm of the micropump. The LIPCA is a composite actuator designed and fabricated with piezoceramics in combination with carbon fabric and glass epoxy. Numerical and experimental methods were used to investigate the performance of the circular LIPCA. The LIPCA was glued to a PDMS membrane to form the diaphragm of the micropump. The diaphragm has several advantages, such as high displacement, dome-shaped deformation and geometrically independent actuation profile. The diaphragm based on a LIPCA 9 mm in diameter produces a deflection of 27 μm at the applied voltage of ± 200 V and a frequency of 1 Hz. The micropump has a maximum water flow rate of 0.95 ml/min and a maximum backpressure of 3.8 kPa. The merits of the present micropump are low cost, ease of manufacturing and high level of effectiveness. The proposed LIPCA is proven to be a promising alternative to the conventional piezoelectric actuator used in micropumps.

You might also be interested in these eBooks
Experimental Mechanics in Nano and Biotechnology View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 326-328)

Pages:

245-248

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.326-328.245

Citation:

Cite this paper

Online since:

December 2006

Authors:

Thanh Tung Nguyen, Nam Seo Goo

Keywords:

LIPCA, PDMS (Polydimethylsiloxane), Piezoelectric Actuator, Valveless Micropump

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2006 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] P. Woias, Sensors and Actuators B Vol. 105 (2005), p.28.

Google Scholar

[2] N.T. Nguyen, X.Y. Huang, K.C. Toh, ASME Trans. J. Fluids Eng. 124 (2002), p.384.

Google Scholar

[3] D.J. Laser and J.G. Santiago, Journal of Micromech. Microeng. Vol. 14 (2004), R35-R64.

Google Scholar

[4] J.H. Kim, C.J. Kang and Y.S. Kim, Journal of Microelectronic Engineering 71 (2004), p.119.

Google Scholar

[5] A. Olsson, Valve-less Diffuser Miropumps, Ph.D. Thesis of the Royal Institute of Technology, Stockholm, Sweden (1998).

Google Scholar

[6] S. Li and S. Chen, Sensors and Actuators A Vol. 104 (2003), p.151.

Google Scholar

[7] C.J. Morris and F.K. Forster, J. Micromech. Microeng. Vol. 10 (2000), p.459.

Google Scholar

[8] K.J. Yoon, S. Shin, H.C. Park and N.S. Goo, J. of Smart Mater. Struct. Vol. 11 (2002), p.163.

Google Scholar

[9] J.C. Lotters et al., J. Micromech. Microeng. Vol. 7 (1997), p.145.

Google Scholar

[10] N.T. Nguyen and X. Huang, Sensors and Actuators A Vol. 88 (2001), p.104.

Google Scholar