Paper Titles
An Experimental Method for Micro-Scale Uniaxial Tension Test
p.233
Measuring Strains for Hematite Phase in Sinter Ore by Electron Backscattering Diffraction Method
p.237
Design and Fabrication of a Flexural Plate Wave Accelerometer
p.241
A Novel PDMS Valveless Micropump with a Circular Lightweight Piezo-Composite Actuator
p.245
Design and Performance Test of Digital Rebalance Loop for MEMS Gyroscope
p.249
Dielectrophoresis of Microparticles with Planar Microelectrode Systems
p.253
Fine Micro Patterning of Conductive Line by Using Direct Inkjet Printing
p.257
Micro-Deformation Measurement on a Specular Surface by DIC with Nanoparticles
p.261
A Study on the Strength under Pressure of Micro Heat Exchanger
p.265

Design and Performance Test of Digital Rebalance Loop for MEMS Gyroscope

Article Preview

Abstract:

In this paper, a digital rebalance loop for MEMS gyroscope is designed and its performance test is performed. First, the system model of MEMS gyroscope is established by dynamic analysis. Then, the digital rebalance loop is designed using modern control technique. The performance of the digital rebalance loop is compared with that of conventional PID rebalance loop. Through frequency response analysis using MATLAB and experiments using a real MEMS gyroscope and digital controller, which is realized using digital signal processor (DSP), it is confirmed that the controller improves the performance of the gyroscope.

You might also be interested in these eBooks
Experimental Mechanics in Nano and Biotechnology View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 326-328)

Pages:

249-252

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.326-328.249

Citation:

Cite this paper

Online since:

December 2006

Authors:

Byung Su Chang, Jang Gyu Lee, Tae Sam Kang

Keywords:

Digital Rebalance Loop, Dilute Sulfuric Peroxide DSP, Gyroscope, Micro-Electromechanical System (MEMS)

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2006 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] W.T. Sung, J.G. Lee, J.W. Song and T. Kang: H∞ Controller design of MEMS gyroscope and its performance test, Proc. IEEE PLANS 2004 (2004), pp.63-69.

DOI: 10.1109/plans.2004.1308975

Google Scholar

[2] K. Zhou, J. C. Doyle, and K. Glover: Robust and Optimal Control, Prentice Hall, New Jersey (1996).

Google Scholar

[3] J. W. Song: State Weighted Model Reduction Based on Frequency Weighted Gramians and Its Application to Micro Inertial Sensors, PH. D. Thesis, Seoul National University (2002).

Google Scholar

[4] B. S. Chang, J. G. Lee and C. G. Park: Digital Rebalance Loop Design for Dynamically Tuned Gyroscope Using Digital Signal Processor, KSAS-JSASS Joint Symposium on Aerospace Engineering (2004), pp.341-344.

Google Scholar