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Advanced Technologies for Estimation of Nonlinear Ultrasonic Parameter

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Abstract:

This paper proposes an advanced signal processing technique for the precise estimation of a nonlinear ultrasonic parameter, based on power spectral and bispectral analysis. The power spectrum and bispectrum estimation of the pulse-like ultrasonic signal used in the commercial SAM (scanning acoustic microscopy) equipment is especially considered in this study. The usefulness of the proposed estimation is confirmed by experiments for a Newton ring with a continuous air gap and a real semiconductor sample with local delaminations. The results show that the nonlinear parameter obtained by the proposed method had a good correlation with the delamination.

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Periodical:

Key Engineering Materials (Volumes 326-328)

Pages:

673-676

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.326-328.673

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Online since:

December 2006

Authors:

Kyung Young Jhang, Kimio Sasaki, Job Ha, Hiroaki Tanaka

Keywords:

Bispectrum, Nonlinear Parameter, Periodogram, Power Spectrum, Signal Processing, Ultrasonic Nonlinearity

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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References

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