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Study on Effects of the Feed on AFM-Based Nanomachining Process

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Abstract:

Effects of the scratching feed on machined surface and scratching forces are studied by using AFM-based nanomachining process scratching along the long axis of the cantilever. Results show: A deeper structure and rougher surface can be obtained at a smaller feed. An increase in the feed results in increases in scratching forces and the resultant force and a decrease in the normal force. Finally, all forces reach to a saturation value. The ratio of the cutting force to the thrust force in the plane perpendicular to the cutting edge can reveal effects of ploughing and cutting between the tip and the sample in the nanomachining process. Correspondingly, different states (cutting or ploughing) play a key role in formation of the machined surface at different feeds.

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Periodical:

Materials Science Forum (Volumes 532-533)

Pages:

257-260

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.532-533.257

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Online since:

December 2006

Authors:

Yong Da Yan, Tao Sun, Shen Dong

Keywords:

Atomic Force Microscope (AFM), Diamond Tip, Nanomachining, Scratching Forces

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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References

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