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Superplastic Nanoforging of Pt-Based Metallic Glass with Dies of Zr-BMG and Glassy Carbon Fabricated by Focused Ion Beam

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Abstract:

This paper introduces a technique for fabricating nano-structures through super plastic nano-forging of metallic glass using nano-scale dies that are fabricated by a focused-ion beam (FIB). FIB-machining characteristics of glassy carbon and Zr-based metallic glass have been studied and are useful for fabricating nano-scale dies because of the isotropic homogeneity of their amorphous structures. We used the dies to nano-forge Pt48.75Pd9.75Cu19.5P22 metallic glass. The thin foil specimens were heated in a small furnace and compressively loaded in a small vacuum chamber. Dies, a die-forged 1μm-diameter micro-gear, and both 800 and 400nm periodic nano-structures for optical applications were demonstrated. We observed the effects of thermal expansion and contact angle between the working material and the die materials on nano-formability. Metallic glasses are highly useful as materials for nano-imprinting and as die materials for FIB nano-machining.

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Periodical:

Materials Science Forum (Volumes 539-543)

Pages:

2088-2093

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.539-543.2088

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Online since:

March 2007

Authors:

Yasunori Saotome, Suguru Okaniwa, Hisamichi Kimura, Akihisa Inoue

Keywords:

Die, Die Forging, FIB, Metallic Glass, Nanoforming, Nanoimprint, Superplasticity

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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