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Study of Indium Oxide Rod-Like Structures Synthesized Using Metalorganic Chemical Vapor Deposition

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Abstract:

We have investigated the morphological changes with varying the substrate temperature in the range of 350-400°C, in synthesizing the indium oxide (In2O3) rod-like structures by using the metalorganic chemical vapor deposition method. The as-synthesized rod-like structures was aligned perpendicular to the Si substrate. X-ray diffraction (XRD) and selected area electron diffraction (SAED) analyses demonstrated that the rods had a cubic In2O3 structure. PL spectra of the In2O3 rod-like structures exhibited the visible light emission. We discussed the possible growth mechanisms.

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THERMEC 2006 Supplement View Preview

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Periodical:

Advanced Materials Research (Volumes 15-17)

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169-174

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https://doi.org/10.4028/www.scientific.net/AMR.15-17.169

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Online since:

February 2006

Authors:

Hyoun Woo Kim, S.H. Shim

Keywords:

Indium Oxide, Metalorganic Chemical Vapor Deposition, Rod Like Structure

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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