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Nanometer Positioning in the Presence of Friction

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Abstract:

This paper deals with nanometer positioning in the presence of friction. The object studied is a ball-screw-driven and linear-ball-guide-supported table system. For this system, the friction dominates the resulting performance for micro-motion and the system exhibits microdynamic characteristic which is rather different from macrodynamics. Inherently a controller with high loop-gain is needed to suppress the effect of friction. A PID controller is designed for the table system for step height smaller than 10μm. Experiment and simulation results indicate that the PID controller can provide a sufficiently high-loop gain and effect of friction is suppressed. In point-to-point(PTP) positioning for step heights from 10μm down to 10nm, the positioning error is within ±2 nm and the response dynamics is satisfactory.

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Progress of Precision Engineering and Nano Technology View Preview

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Periodical:

Key Engineering Materials (Volume 339)

Pages:

217-222

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.339.217

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Online since:

May 2007

Authors:

Li Hua Lu, Yong Feng Guo, H. Tachikawa, Ying Chun Liang, Akira Shimokohbe

Keywords:

Friction, Microdynamics, Nanometer Positioning, PID Controller

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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