A Stage Based on Voice Coil Motor with High Speed and Long Range for Laser Micro/Nano Fabrication

Ki Hyun Kim; Dae Gab Gweon; Hyun Soo Jung; Soo Hun Lee; Min Sung Hong; Moon G. Lee

doi:10.4028/www.scientific.net/KEM.345-346.757

Paper Titles

An Approach to Prediction of Evolution of Material Properties in the Vicinity of Frictional Interfaces in Metal Forming
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A Novel Capacitance Bulge Apparatus and Measurements of the Mechanical Properties of Al Thin Films Using It
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Performance Evaluation of a Valveless Micropump Considering Electro-Structural-Fluid Interaction
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Effect of TRIP on the Damping Capacity and Strength in Fe-Al-Mn Alloy
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A Stage Based on Voice Coil Motor with High Speed and Long Range for Laser Micro/Nano Fabrication
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In Situ Monitoring of Residual Strain Using Multilayered Microcantilever in Piezoelectric-Driven Microactuator
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Effect of Size for Micro-Scale Dimples on Surface under Lubricated Sliding Contact
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Friction Behavior for Micro-Scale Grooved Crosshatch Pattern under Lubricated Sliding Contact
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Abrasivity of a Dentifrice containing Nano Carbonate Apatite
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 345-346A Stage Based on Voice Coil Motor with High Speed...

A Stage Based on Voice Coil Motor with High Speed and Long Range for Laser Micro/Nano Fabrication

Abstract:

Design of design of X-Y-Theta fine stage using VCM (voice coil motor) is presented in this paper. This fine stage is combined with linear DC motor. Long range, high speed and high precision of the stage is obtained by using dual servo control for laser micro/nano machining. A novel structure of VCM for the fine stage is proposed. The fine stage can have 3 DOF(X-Y-Theta) motion by four VCM actuators which are located on the same plane. The X-Y-Theta fine stage is designed to have high acceleration for high throughput. Based on the design, the stage is fabricated. The designed stage has the acceleration of 5m/s2 with 45kg total mass. In addition, this actuator is feedback controlled using HP laser interferometer. The reaction force between the coarse and fine stage of the dual servo is compensated by force compensator.