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A study on MicroCantilever Deflection for the Infrared Image Sensor using Bimetal Structure

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Abstract:

This is a widespread requirement for low cost lightweight thermal imaging sensors for both military and civilian applications. The feasibility of micromechanical optical and infrared (IR) detection using microcantilevers is demonstrated. Microcantilevers provide a simple Structurefor developing single- and multi-element sensors for visible and infrared radiation that are smaller, more sensitive and lower in cost than quantum or thermal detectors. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress originating from the bimetallic effect. This paper reports a micromachined silicon uncooled thermal imager intended for applications in automated process control.

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Periodical:

Key Engineering Materials (Volumes 345-346)

Pages:

785-788

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.345-346.785

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Online since:

August 2007

Authors:

Hyun Su Kim, Young Chul Park, Seung Hwan Oh, Se Hun Kim, Young Jik Jo, Jung Ho Kang

Keywords:

Bi-Metal, Deflection, Infrared Image Sensor, Micro Cantilever

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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References

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