Paper Titles
The Design of an Atmospheric Pressure Plasma Torch Used for Polishing Ultra-Smooth Surfaces
p.340
The Influence of Surfactant CTAB on the Microstructure and Material Properties of Nickel Microelectroforming
p.346
The Current State and Development Trends of Deterministic Ultraprecision Optical Surfaces Machining Technology
p.351
The Wear Behavior of Pulse Current Electroforming Ni-P-SiC Composite Coatings
p.358
A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface
p.364
A Contact Stylus Profilometer Based on Linnik Interference Microscope
p.371
A Novel Time Based Current Compensator for LED Back Light Modules
p.377
A Rapid Prototyping Apparatus for Forming Ceramic Parts
p.383
Design of the Servo System for the Micro Milling Machine
p.389

A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface

Article Preview

Abstract:

A profilometer for micro-surface topography measurement is presented. The instrument is based on the scanning white-light microscopic interferometry (SWLMI). A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded by a CCD camera. A developed nano-positioning work stage with integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By white-light phase shifting algorism of arbitrary steps, frames of interferograms are processed by computer to rebuild and evaluate the measured profile. Because of the specialty of SWLMI, the profilometer is suitable for both smooth and rough surface measuring. It also can be used for the measurement of curved surface, dimension of MEMS etc. The vertical resolution of the profilometer is 0.5nm, lateral resolution 0.5+m.

You might also be interested in these eBooks
Optics Design and Precision Manufacturing Technologies View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 364-366)

Pages:

364-370

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.364-366.364

Citation:

Cite this paper

Online since:

December 2007

Authors:

Rong Dai, Tie Bang Xie, Su Ping Chang

Keywords:

Interference Microscope, Positioning Work Stage, Profilometer, Vertical Scanning Interferometry, White Light Interferometry

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2008 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] B.S. Lee, T.C. Strand: Appl. Opt. Vol. 29(1990), p.3784.

Google Scholar

[2] P. J. Caber, S. J. Martinek, R. J. Niemann: SPIE Vol. 208(1993), p.195.

Google Scholar

[3] S. K. Gordon, S.C.C. Stanley: Appl. Opt. Vol. 29(1990), p.3775.

Google Scholar

[4] P. Pavel , S. Jan: Appl. Opt. Vol. 42(2003), p.1809.

Google Scholar

[5] Information on http: /www. veeco. com. cn.

Google Scholar

[6] P. de Groot,D., X. C. de Leslie, K. Jim, T. Michael: Appl. Opt. Vol. 41(2002), p.4571.

Google Scholar

[7] K.G. Larkin: J. Opt. Soc. Am . A Vol. 13(1996), pp.832-843.

Google Scholar

[8] G. Stoilov , T. Dragostinov: Optics and Lasers in Engineering Vol. 28(1997), p.61.

Google Scholar

[9] Q.X. Li, D.S. Wang, Y.H. Li: Modern precision mechanism design(Qinghua University Publications, P.R. China, 2004).

Google Scholar

[10] R. Dai, T.B. Xie, S.P. Chang: J. Phys., Conf. Ser. Vol. 13(2005), p.94.

Google Scholar

[11] J.Q. Chen: Material mechanics(Huazhong University of Science and Technology Publications, P.R. China, 2001).

Google Scholar

[12] X.Q. Jiang S.J. Xiao, T.B. Xie, Z. Li: Chinese Journal of Scientific Instrument Vol. 16 (1995), p.374.

Google Scholar

[13] Q.G. Mao: The measurement and evaluation of surface roughness(Machine Press, P.R. China, 1991).

Google Scholar