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A Contact Stylus Profilometer Based on Linnik Interference Microscope

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Abstract:

We have constructed a novel contact stylus profilometer which is, in a certain sense, a combination of a lever system, an x-y stage, a vertical scanning stage and a Linnik microscope interferometer with a spatially and temporally incoherent light source. The system has large measurement range, high precision and small touch force. Its vertical measuring range is ±5 mm with a resolution below 2 nm, and the horizontal measuring range is ±25 mm in x- and y-range with a resolution of 1.25 μm. This paper describes the system and its performance along with results of measuring some samples.

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Periodical:

Key Engineering Materials (Volumes 364-366)

Pages:

371-376

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.364-366.371

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Online since:

December 2007

Authors:

Jian Ping Yun, Ling Ling Zhang, Tie Bang Xie, Guo Yuan Hu

Keywords:

Interference Microscope, Stylus Instrument, Surface Profile

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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