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Adhesion Promoter and Anti-Sticking Layer Effects on Adhesion Properties Using Symmetric AFM Probe

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Abstract:

The reliable reproducibility of nano patterns or other nano structures is one of many issues in the nano-imprint lithography process. An important prerequisite for reproducibility is suitable adhesion properties of adhesion promoters or anti-sticking layer. In this study, rhombus shaped symmetrical probe with a flat tip was developed and fabricated using MEMS fabrication technique. For the experimental setup of the adhesion test using a UV curable PAK01 resin coated AFM tip with several adhesion promoters, the flat tip is covered by PAK01 resist using micromanipulator. Anti-sticking layers of silane agents were prepared on the tip by vapor deposition method. Adhesion force between various adhesion promoters (GPTS, APMDS, APTS, DUV30J, O2 planairzation) and PAK01 resist and the force between anti-sticking layer (FOTS, DDMS) and PAK01 resist were evaluated using the force-distance mode of AFM. Adhesion force of GPTS and FOTS are about 7180 nN and 1660 nN, respectively.

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Info:

Periodical:

Advanced Materials Research (Volumes 26-28)

Pages:

1113-1116

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.26-28.1113

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Online since:

October 2007

Authors:

Hee Jung Lee, Seung Min Hyun, Hak Joo Lee, Dae Geun Choi, Dong Il Lee, Eung Sug Lee

Keywords:

Adhesion Promoter, Anti-Sticking Layer, Atomic Force Microscope (AFM), Nanoimprint Lithography, Symmetric AFM Probe

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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