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A Piezoelectric Micropump Based on MEMS Fabrication

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Abstract:

This paper presents a valve-less micropump which is actuated by a piezoelectric ceramic chip. We employ a microelectromechanical system process for the silicon substrate and anodic bonding for assembly of the Pyrex glass and silicon wafer. The reciprocating type micropump contains two nozzle/diffuser elements and a silicon membrane with an embedded piezoelectric ceramic actuator.

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Periodical:

Key Engineering Materials (Volumes 368-372)

Pages:

215-217

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.368-372.215

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Online since:

February 2008

Authors:

Bao Wei Wang, Xiang Cheng Chua, Long Tu Li

Keywords:

Micro Pump, Micro-Electromechanical System (MEMS), Piezoelectric

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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References

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[2] P. Woias: Sensors and Actuators B Vol. 105 (2005), pp.28-38.

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[3] C. Yamahata, F. Lacarme, et al.: Microelectronic Engineering. Vol. 78-79 (2005), pp.132-137.

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[4] M. GadelHak: The MEMS Handbook (CRC PRESS, New York, USA, 2002). Fig. 6 Photograph of silicon wafer after the first etching process Fig. 7 Photograph of silicon wafer after the second etching process Fig. 8 Photograph of diffusers of inlet and outlet.

DOI: 10.17816/brmma83512-53037

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