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Fabrication of Piezoelectric Cantilever Beam Based on Nanostructured PZT Film

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Abstract:

A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In this process, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder in composition, and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/SiO2/Si substrate using spin-coating route. Above process was repeated in order to deposit the desired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 μm was obtained after annealing at 650 °C for 2 h and it has the saturation polarization of 54 μC/cm2, the remnant polarization of 30 μC/cm2 and the coercive field of 50 kV/cm.

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Periodical:

Key Engineering Materials (Volumes 368-372)

Pages:

223-225

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.368-372.223

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Online since:

February 2008

Authors:

Hong Mei Liu, Quan Liang Zhao, Cheng Jun Qiu, Mao Sheng Cao

Keywords:

Cantilever Beam, PZT, Sol-Gel (SG), Thick Film

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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