Paper Titles
Effects of Processing on Microstructure and Dielectric Properties of Ultrafine- Grained Barium Titanate Based Ceramics for BME-MLCC Applications
p.43
Synthesis, Characterization and Electrical Properties of Barium Titanate Films Fabricated by Hydrothermal Method
p.47
Preparation of Barium Strontium Titanate Nanopowders by a Sol-Gel Hydrothermal Synthesis Method
p.50
Low Temperature Hydrothermal Synthesis and Sintering of Ba0.6Sr0.4TiO3
p.53
Effect of Annealing Temperature on the Microstructure of Barium Strontium Titanate Films
p.56
Microstructure and Dielectric Properties of Ba0.5Sr0.5TiO3 Ceramics by Spark Plasma Sintering
p.59
Dielectric Behavior of (1-X)BaTiO3-XCaCu2.94Mn0.06Ti4O12 Composite Ceramics
p.62
Influence of Excess Bi2O3 on the Characteristics of (Na0.5Bi0.5)TiO3-BaTiO3 Ceramics
p.65
Effects of Mn-Doping on the Piezoelectric and Ferroelectric Properties of (Na0.8K0.2)0.5Bi0.5TiO3 Ceramics
p.69

Effect of Annealing Temperature on the Microstructure of Barium Strontium Titanate Films

Article Preview

Abstract:

Barium strontium titanate (Ba1−xSrxTiO3, BST) films have been prepared on Pt/Ti/SiO2/Si by medium frequency (MF) magnetron sputtering, and subsequently in situ crystallized at 500-700°C. The microstructures of the MF-BST films are studied. BST films prepared by radio frequency (RF) magnetron sputtering and exhibited preferential (110) orientation, are compared. XRD shows that the MF-BST films exhibit preferential (111) orientation and better crystallization than the RF-BST films at the same annealing temperature. AFM displayed that the MF-BST films were smooth and compact. XPS analysis exhibited that the MF-BST films revealed better surface and interface structural characteristics. Their dielectric properties were also compared.

You might also be interested in these eBooks
High-Performance Ceramics V View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 368-372)

Pages:

56-58

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.368-372.56

Citation:

Cite this paper

Online since:

February 2008

Authors:

Jia Xuan Liao, En Qiu Li, Zhong Tian, Jiang Xu, Hai Guang Yang

Keywords:

Barium Strontium Titanate Film, Medium Frequency Magnetron Sputtering

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2008 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] M. W. Cole, P. C. Joshi and M. H. Ervin: J. Appl. Phys. Vol. 89 (11) (2001), p.6336.

Google Scholar

[2] J. X. Liao, C. R. Yang, Z. Tian, et al.: J. Phys. D: Applied Physics, Vol. 39(11) (2006), p.2473.

Google Scholar

[3] K. H. Ahn, S. Baik and S. S. Kim: Journal of Applied Physics, Vol. 92 (5) (2002), p.2651.

Google Scholar

[4] C. S. Liang and J. M. Wu: Journal of Crystal Growth, Vol. 274 (2005), p.173.

Google Scholar

[5] J. Im, O. Auciello and S. K. Streiffer: Thin Solid Films, Vol. 413 (2002), p.243.

Google Scholar

[6] J. W. Zhai and H. Chen: Applied Physics Letters, Vol. 84 (7) (2004), p.1162.

Google Scholar

[7] S. Saha and S. B. Krupanidhi: Applied Physics Letters, Vol. 79 (1) (2001), p.111.

Google Scholar

[8] X. H. Sun, B. L. Zhu, T. Liu, et al.: Journal of Applied Physics, Vol. 99 (2006), p.084103.

Google Scholar

[9] J. X. Liao, C. R. Yang, J. H. Zhang, et al.: Key Engineering Materials, Vol. 336-338 (2007), p.374.

Google Scholar