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HomeMaterials Science ForumMaterials Science Forum Vols. 52-53Investigation of the Mechanical Properties of 25...

Investigation of the Mechanical Properties of 25 nm and 90 nm, Hard Carbon Films Residing on Al

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Properties and Characterization of Amorphous Carbon Films

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Periodical:

Materials Science Forum (Volumes 52-53)

Pages:

657-670

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.52-53.657

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Online since:

January 1990

Authors:

W.R. LaFontaine, T.W. Wu, P.S. Alexopoulos, D. Stone

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© 1990 Trans Tech Publications Ltd. All Rights Reserved

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