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HomeMaterials Science ForumMaterials Science Forum Vol. 203Deposition of Doped and Undoped ZnO Thin Films fo...

Deposition of Doped and Undoped ZnO Thin Films fo Gas Sensors

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Periodical:

Materials Science Forum (Volume 203)

Pages:

137-142

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.203.137

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Online since:

February 1996

Authors:

M. Penza, C. Martucci, V.I. Anisimkin, L. Vasanelli

Keywords:

SAW Gas Sensors, Sputtering, X-Ray Diffraction (XRD), Zinc Oxide Thin Film

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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