Paper Titles
Processing and Characterization of Ba-Based Layered Ferroelectric Relaxors
p.595
Structural Characterisation of Zinc Oxide Thin Films Produced by Spray Pyrolysis
p.599
Growth Model of Gas Species Produced by the Hot-Wire and Hot-Wire Plasma-Assisted Techniques
p.603
Study of PbTe Epitaxial Layers Grown Directly Over Silicon Wafers
p.607
Hard Nanocomposite Coatings Prepared by Magnetron Sputtering
p.613
Nanometer-Scale Multilayered Mo/Ti0.4Al0.6N Hard Coatings
p.623
Structural and Thermal Behaviour of a W-Ti-N Sputtered Film after Thermal Annealing
p.627
Mechanical Alloying of Fe-Cu Alloys from As-Received and Premilled Elemental Powder Mixtures
p.631
Improving the Cutting Performance of TiAlN Coatings Using Submicron Metal Interlayers
p.635

Hard Nanocomposite Coatings Prepared by Magnetron Sputtering

Article Preview

Abstract:

You might also be interested in these eBooks
Advanced Materials Forum I View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 230-232)

Pages:

613-622

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.230-232.613

Citation:

Cite this paper

Online since:

October 2002

Authors:

Jindřich Musil, J. Vlček, F. Regent, F. Kunc, H. Zeman

Keywords:

Hard Nanocomposite Films, Magnetron Sputtering, Mechanical Property, Physical Properties

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2002 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] H.Gleiter: Prog.Mater.Sci. 33(1989), 223

Google Scholar

[2] R.Birringer: Mater.Sci.Eng.A117(1989),33

Google Scholar

[3] S.A. Barnett, in M.Fracombe, J.A. Vossen (Eds.), Physics of Thin Films, Academic Press, N.Y. 1993, p.1

Google Scholar

[4] H.Gleiter: Nanostructured Mater. 6(1996), 3

Google Scholar

[5] K.Lu: Mater.Sci.Eng. R16(1996), 161

Google Scholar

[6] J.Musil and J.VlNek: Materials Chemistry and Physics 54(1998), 116

Google Scholar

[7] S.Veprek: J.Vac.Sci.Technol. A17(1999), 2401

Google Scholar

[8] J.Musil: Surf. Coat. Technol. 25(2000), 322

Google Scholar

[9] A.A. Voevodin and J.S. Zabinski: Thin Solid Films 370(2000), 223

Google Scholar

[10] J.Musil and J.VlNek: Surf. Coat. Technol. 142/144 (2001), 557

Google Scholar

[11] S.Veprek, P.Nesládek, A.Niederhofer, F.Glatz, M.Jílek and M.Šíma: Surf. Coat. Technol. 108-109(1998), 138

Google Scholar

[12] A.A. Voevodin and J.S. Zabinski: Diamond and Related Materials 7(1998), 463

Google Scholar

[13] J.A. Thornton: Ann.Rev.Mater.Sci. 7(1977), 239

Google Scholar

[14] J.Musil and F.Regent: J.Vac.Sci.Technol. A16(6)(1998), 1209

Google Scholar

[15] J.Musil, P.Zeman, H.Hrubý and P.Mayrhofer: Surf. Coat. Technol. 120-121(1999), 179

Google Scholar

[16] J.Musil, H.Hrubý, P.Zeman, H.Zeman, R.Serstvý, P.H. Mayrhofer and C.Mitterer: Surf. Coat. Technol. 142-144 (2001), 603

DOI: 10.1016/s0257-8972(01)01200-2

Google Scholar

[17] S.Veprek, A.Niederhofer, K.Moto, T.Bolom, H.-D.Männling, P.Nesládek, G.Dollinger and A.Bergmaier: ICMCTF 2000, Session B1-2-2-7, Abstract No.796, Surf.Coat.Technol. 133-134 (2000), 152

DOI: 10.1016/s0257-8972(00)00957-9

Google Scholar

[18] T.Y. Tsui, G.M. Pharr, W.C. Oliver, C.S. Bhatia, R.L. White, S.Anders, A.Anders and I.G. Brown : Mater.Res.Soc.Symp.Proc. 383(1995), 447

DOI: 10.1557/proc-383-447

Google Scholar

[19] F.Regent and J.Musil: Surf.Coat.Technol. 142-144 (2001), 146

Google Scholar

[20] F.Regent: Formation of nanocomposite Cr-Ni-N and Ti-Mo-N films by magnetron sputtering, Ph.D. Thesis, March 2001, University of West Bohemia, PlzeV, Czech Republic

Google Scholar

[21] J.Musil, F.Kunc, H.Poláková and H.Zeman: Mechanical properties of hard and superhard nanocomposite coatings and problems in their measurements by microindentation, Surf.Coat.Technol. (2002), in press Figures Fig.1. Hardness H as a function of Young´s modulus E * for selected hard nanocomposite and binary nitride films magnetron sputtered under different deposition conditions. Fig.2. Hardness H and microstrain Eg or e in the Ti-Mo-N films with (a) the same orientation of grains and (b) different orientations of grains, magnetron sputtered under different deposition conditions, as a function of average size of grains Lc or D. The microstrain and average size of grains were evaluated from the Scherrer formula (Ec, Lc) and the Voigt function (e, D). Fig.3. Hardness H and microstrain e in the Cr-Ni-N films with (a) the same orientation of grains and (b) different orientations of grains, magnetron sputtered under different deposition conditions, as a function of average size of grains D. The microstrain and average size of grains were evaluated from the Voigt function. Fig.4. Microhardness H of 2.4 µm thick Ti-Al-N film, 4 µm thick Ti-B film and 6 µm thick Zr-Cu-N film magnetron sputtered on 15330 CSN steel substrate as a function of the Vicker´s diamond indenter load L.

Google Scholar