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Annealing Temperature Effect of PbZr0.4Ti0.6O3 Film on La1/2Sr1/2CoO3 Bottom Electrode

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Abstract:

We have investigated the ferroelectric and electrical properties of PZT 40/60 films on the bottom La1/2Sr1/2CoO3(LSCO) electrode. The LSCO bottom electrode was sputtered on the SiO2/Si(100). As the annealing temperature of PZT capacitors on the LSCO is increased, the ferroelectric properties gradually increase with the annealing temperature up to 650°C. However, for the PZT capacitors annealed above 650°C, electrical measurement cannot be performed.

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Periodical:

Materials Science Forum (Volumes 449-452)

Pages:

957-960

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.449-452.957

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Online since:

March 2004

Authors:

Jai Hyun Kim, Kyung Shin Koh, Woong Kil Choo

Keywords:

Ferroelectric Property, LSCO, PZT, Sol-Gel Process, X-Ray Method

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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