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Fabrication of a High-Aspect-Ratio Nano Tip Integrated Micro Cantilever with a ZnO Piezoelectric Actuator

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Periodical:

Key Engineering Materials (Volumes 270-273)

Pages:

1095-1100

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.270-273.1095

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Online since:

August 2004

Authors:

Sang H. Lee, Seung Seok Lee, J.J. Choi, Jong U. Jeon, K. Ro

Keywords:

Ferroelectric Material, High-Aspect-Ratio Tip, Nano Storage System, Nano Tip, Trench Refilling Process, ZnO Piezoelectric Cantilever

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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