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A Method for Quantitative Evaluation of Electrical Conductivity of Silicon Wafers by Millimeter-Waves

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Periodical:

Key Engineering Materials (Volumes 270-273)

Pages:

41-45

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.270-273.41

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Online since:

August 2004

Authors:

Yang Ju, Yasushi Ohno, Masumi Saka

Keywords:

Calibration, Conductivity, Millimeter-Wave, Quantitative Evaluation, Silicon Wafer

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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