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Influence of the Gas Phase Composition on Nanocrystalline Diamond Films Prepared by MWCVD

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Abstract:

Nanocrystalline diamond (NCD) films have been prepared by microwave plasma chemical vapor deposition (MWCVD) from methane/nitrogen mixtures, and the influence of the gas phase composition on the basic properties of the films (composition, morphology, topography, crystallinity and bonding structure) was investigated.

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Periodical:

Journal of Metastable and Nanocrystalline Materials (Volume 23)

Pages:

31-34

DOI:

https://doi.org/10.4028/www.scientific.net/JMNM.23.31

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Online since:

January 2005

Authors:

Cyril Popov, Miroslav Jelínek, S. Boycheva, V. Vorlícek, Wilhelm Kulisch

Keywords:

Characterization, Microwave Plasma CVD, Nanocrystalline Diamond Film

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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