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Nano Pattern Mold Technology Using Nano Stamper Based on Quartz

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Abstract:

In this paper, we present a reusable quartz master fabricated by electron-beam lithography and the results of the preliminary test of injection molding using the reusable quartz master. Since patterned structures of photoresist can be easily damaged by demolding process of nickel stamper and master, a master with photoresist cannot be reused in stamper fabrication process. In this work, we have made it possible of the repeated use of master by directly patterning on quartz in nickel stamper fabrication process. We have developed a 100nm-pit sized reusable quartz master with intaglio carving patterns of finer sizes than those of DVD (400nm) and blue-ray disc (200nm). In the preliminary test of the injection molding, we have found optimum injection molding conditions using polypropylene.

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Periodical:

Key Engineering Materials (Volumes 277-279)

Pages:

912-918

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.277-279.912

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Online since:

January 2005

Authors:

Doo Sun Choi, Tae Jin Je, Young Ho Seo, Kyung Hyun Whang

Keywords:

Electron-Beam Lithography, Injection Molding, Reusable Quartz Master

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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References

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