Paper Titles
Effects of Annealing on the Structure and Photoluminescence of Amorphous SiC:Tb Films Deposited on Porous Silicon
p.3681
Infrared Transmission Performance of Gallium Phosphide Thin Films Deposited by RF Magnetron Sputtering
p.3685
Laser Induced Preparation of Flexible Cold Cathode and Its Electron Emission Properties
p.3689
Microstructure and Optical Properties of (Zr0.8, Sn0.2)TiO4 Thin Films Grown on Si(100) Substrates by a Sol-Gel Process
p.3693
Optical and Electrical Properties of Transparent Conductive ITO Thin Films under Proton Radiation with 100 keV
p.3697
Photoluminescence of SnO2 Films Prepared by APCVD
p.3701
Photoinduced Changes in Sn-Doped Sol-Gel Silica Glass Films
p.3705
Optical Properties of Silica Films Prepared on Sapphire
p.3709
The Morphology and Optical Characterizations of AlGaN/GaN Based on Al2O3 Prepared by MOCVD
p.3713

Optical and Electrical Properties of Transparent Conductive ITO Thin Films under Proton Radiation with 100 keV

Article Preview

Abstract:

Under the simulation environment for the vacuum and heat sink in space, the changes in optical and electrical properties of transparent conductive indium tin oxide (ITO) thin films induced by radiation of protons with 100 keV were studied. The ITO thin films were deposited on JGS1 quartz substrate by a sol-gel method. The sheet resistance and transmittance spectra of the ITO thin films were measured using the four-point probe method and a spectrophotometer, respectively. The surface morphology was analyzed by AFM. The experimental results showed that the electrical and optical performances of the ITO thin films were closely related to the irradiation fluence. When the fluence exceeded a given value 2×1016 cm-2, the sheet resistance increased obviously and the optical transmittance decreased. The AFM analysis indicated that the grain size of the ITO thin films diminished. The studies about the radiation effect on ITO thin films will help to predict performance evolution of the second surface mirrors on satellites under space radiation environment.

You might also be interested in these eBooks
PRICM-5 View Preview

Info:

Periodical:

Materials Science Forum (Volumes 475-479)

Pages:

3697-3700

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.475-479.3697

Citation:

Cite this paper

Online since:

January 2005

Authors:

Q. Wei, S.Y. He, J.C. Liu, D.Z. Yang

Keywords:

Indium tin Oxide (ITO) Thin Films , Optical Transmittance, Proton Radiation, Sheet Resistance

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2005 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] A.I. Akishiu: Effects of Space Conditions on Materials (Nova Science Publishers, Inc., New York 2001).

Google Scholar

[2] G.Z. Chen and G.C. Lin: Chinese Space Science and Technology No. 6 (1994), p.43.

Google Scholar

[3] S. Czepiela, D. Hastings and H. McManus: American Institute of Aeronautics and Astronautics, AIAA 97-0629, pp.1-9.

Google Scholar

[4] Y.S. Lu, Y.D. Feng, H.M. Zhai and Y. Wang: Chinese Journal of Space Science, Vol. 19 (1999), p.375.

Google Scholar

[5] M.J. Alam, D.C. Cameron: Thin Solid Films Vol. 420-421 (2002), p.76.

Google Scholar

[6] K. Nishio, T. Sei and T. Tsuchiya: J. Mat. Sci. Vol. 31 (1996), p.1761.

Google Scholar

[7] Y. Djaoued, V.H. Phong, S. Badilescu, P.V. Ashrit, F.E. Girouard and V.V. Truong: Thin Solid Films Vol. 293 (1997), p.108.

DOI: 10.1016/s0040-6090(96)09060-8

Google Scholar

[8] K.L. Chopar, S. Major and D.K. Pandya: Thin Solid Films Vol. 102 (1983), p.1.

Google Scholar

[9] D.M. Mattox: Thin Solid Films Vol. 204 (1991), p.25.

Google Scholar

[10] H. Wulff, M. Quaas and H. Steffen: Thin Solid Films Vol. 355-356 (1999), p.395.

DOI: 10.1016/s0040-6090(99)00545-3

Google Scholar

[11] P. Thilakan, S. Kalainathan, J. Kumar and P. Ramssamy: J. Electron. Mater. Vol. 24 (1995), p.719.

Google Scholar

[12] Z.B. Zhou, Y.Z. Zhang, L.K. Zhang and X.Z. Du: Journal of Anhui Normal University (Natural Science) Vol. 18 (1995), p.66.

Google Scholar

[13] T. Furusaki and K. Kodaira: High Perform. Ceram. Films Coat. Vol. 1 (1991), p.241.

Google Scholar

[14] T. H. Chang: Aerospace Shanghai No. 6 (2002), p.51.

Google Scholar

[15] V.V. Abraimov, Y.S. Qin, H.S. Yu, Y.D. Zhuang, L.K. Kolybaev, E.T. Verkhovtseva, V.F. Rybalko, I.M. Nekludov, V.I. Yaremenko and A.S. Zaika: The FiFth Sino-Russian-Ukrainian Symposium on Space Science and Technology Held Jointly With The First International Forum on Astronautics and Aeronautics. (Harbin Institute of Technology, Harbin, P. R. China, 2000), p.700.

Google Scholar

[16] S.G. Zhang, B.Y. Huang and X.H. Fang: Materials Review Vol. 11 (1997), p.11.

Google Scholar

[17] S. -S. Kim, S. -Y. Choi, C. -G. Park and H. -W. Jin: Thin Solid Films Vol. 347 (1999), p.155.

Google Scholar

[18] I. Hamberg and C.G. Granqvist: J. Appl. Phys. Vol. 60 (1980), p.123.

Google Scholar