Paper Titles
Structure and Properties of Ti-Al Intermetallic Layers Produced on Titanium Alloys by a Duplex Treatment
p.3883
The Use of Trimethylaluminum for Producing Surface Layers by the PACVD Method
p.3887
Control of Boundary Structure and Grain Growth for Microstructural Design
p.3891
Hydrophilic Properties of TiO2-Al2O3 Composite Thin Films
p.3897
Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition
p.3901
Process of Film Formation By Anodizing AZ91D Magnesium Alloy
p.3905
Study of Electronic Structure In Ni3Fe/Al2O3/Ni3Fe Magnetic Tunnel Junction with Various Ferromagnetic Layer Thicknesses
p.3909
Development of Wear Resistant Zirconium Oxide Thin Films on Stainless Steel Substrates
p.3915
A Control of the Nanopore Regularity in Alumina Layer
p.3919

Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition

Article Preview

Abstract:

Diamond like carbon (DLC) films were prepared on Si wafer, using laser induced arc deposition (Laser arc) technique. Results of Raman Spectra analysis showed that the as-deposit films were amorphous, having obvious sp3 structure. Meanwhile, surface topography and micro-tribological properties were investigated by using Atomic Force Microscope and Nano-Scratch Tester. Influences of arc voltage, substrate bias voltage, target materials and substrate pre-treatment methods upon the film structures and film properties were studied.

You might also be interested in these eBooks
PRICM-5 View Preview

Info:

Periodical:

Materials Science Forum (Volumes 475-479)

Pages:

3901-3904

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.475-479.3901

Citation:

Cite this paper

Online since:

January 2005

Authors:

Na-na Jiang, Tian Min Shao, Da Rong Chen

Keywords:

Diamond-Like Carbon (DLC), Laser Induced Arc Deposition, Property Analysis

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2005 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] Li-Ye Huang, Ke-Wei Xu, Jian Lu, et. al: Surface and Coatings Technology Vol. 154(2002), pp.232-236.

Google Scholar

[2] Q. Wei, A.K. Sharma, J. Sankar, J. Narayan: Composites: Part B 30(1999) pp.675-684.

Google Scholar

[3] B. Schultrich, H. -J. Scheibe, D. Drescher, et. al. : Surface and Coatings Technology Vol. 98(1998) pp.1097-1101.

Google Scholar

[4] H. Ziegele, H.J. Scheibe, B. Schultrich: Surface and Coatings Technology 97(1997) pp.385-390.

DOI: 10.1016/s0257-8972(97)00218-1

Google Scholar

[5] Jiang Nana, Shao Tianmin, Chen Darong: Journal of Inorganic Materials Vol. 20 (2005) in press.

Google Scholar

[6] ELZBIETA STARYGA: Chaos. Solitons & Fractals Vol. 10(1999) pp.1075-1086.

Google Scholar

[7] A.A. Ogwu, R.W. Lamberton, S. Morley, et. al. : Physica B 269 (1999).

Google Scholar