Indentation of AlN/CrN Multilayers from Room Temperature to 400 °C

Article Preview

Abstract:

Observations elsewhere have shown that multilayer structures with layers ~10 nm thick can be harder than monolithic ones. Here we see whether these effects can be observed at high temperatures and investigate the effect of temperature on the manner of deformation. The hardness of an AlN/CrN multilayer structure with a range of wavelengths from 6-200 nm has been measured at temperatures from room temperature to 400 oC. The changes in hardness have been related to the deformation behaviour observed by cross-sectional transmission electron microscopy and atomic force microscopy. These observations suggest that the mechanical properties of the coatings are dominated by the refinement in the columnar microstructure rather than directly by an effect of the layer interfaces on dislocation motion.

You might also be interested in these eBooks

Info:

Periodical:

Materials Science Forum (Volumes 492-493)

Pages:

335-340

Citation:

Online since:

August 2005

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2005 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] W.D. Sproul: Surf. Coat. Tech. Vol. 86-87 (1996), p.170.

Google Scholar

[2] M. Shinn and S.A. Barnett: Appl. Phys. Lett. Vol. 64 (1) (1994), p.61.

Google Scholar

[3] P.M. Anderson, T. Foecke and P.M. Hazzledine: MRS Bull. Vol. 24 (2) (1999), p.27.

Google Scholar

[4] W.C. Oliver and G.M. Pharr: J. Mater. Res. Vol. 7 (6) (1992), p.1564.

Google Scholar

[5] R.M. Langford and A.K. Pettford-Long: J. Vac. Sci. Techn. A Vol. 19 (5) (2001), p.2186.

Google Scholar

[6] I. Yonenaga: MRS Internet. J. Nitride Semicond. Res. Soc. Vol. 7 (6) (2002).

Google Scholar

[7] A. Lousa, et al.: Surf. Coat. Tech. Vol 146-147 (2001), p.146.

Google Scholar

[8] D.M. Marsh: Proc. R. Soc. Vol. A279 (1964), p.420.

Google Scholar

[9] J.M. Molin-Aldareguia, et al.: Philos. Mag. A Vol. 82 (2002), p. (1983).

Google Scholar