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Joint Design and Fabrication for Mechanical Elastic Self-deformation Micro-Assembly Technology

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Abstract:

A microstructure assembled into another part using the mechanical elastic self-deformation assembly technology is proposed in the paper. To attain the self-deformation during assembling, the assembly joint on the microstructure is analytically designed as the feature with an appropriate taper and cross clearance. Take account of the accuracy, the whole process from micro-fabrication to micro-assembly is carefully planned and practiced under a micro-EDM machining center system which consists of vertical micro-EDM with dividing mechanism, and horizontal micro-machining mechanism, which is referred to as on-process micro-assembly. To illustrate the micro-assembly strategies and procedures, a micro-rotor production including assemble a tungsten carbide four-phase micro-rotor into an alumina base has been provided and discussed.

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Periodical:

Materials Science Forum (Volumes 505-507)

Pages:

829-834

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.505-507.829

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Online since:

January 2006

Authors:

Chia Lung Kuo, Jing Dae Huang

Keywords:

Elastic Self-Deformation, Electric Discharge Machining (EDM), Micro-Assembly, Micro-Rotor

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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References

[1] P. Rai-Choudhury, Handbook of Microlithography, Micromachining, and Microfabrication. Bellingham, WA: SPIE Optical Engineering, (1997).

Google Scholar

[2] S., Fatikow, and U., Rembold, Microsystem Technology and Microrobotics, Springer, (1996).

Google Scholar

[3] M., Madou, Fundamentals of Microfabrication, CRC, (1997).

Google Scholar

[4] W., Bacher, W., Menz, and J., Mohr, The LIGA Technique and Its Potential for Microsystems-A survey, IEEE Transactions on Industrial Electronics, Vol. 42, No. 5, pp.431-441, (1995).

DOI: 10.1109/41.464604

Google Scholar

[5] H., Yang, and S.W., Kang, Improvement of Thickness Uniformity in Nickel Electroforming for the LIGA Process, International Journal of Machine Tools & Manufacture, Vol. 40, pp.1065-1072, (2000).

DOI: 10.1016/s0890-6955(99)00107-8

Google Scholar

[6] K.D., Wise, Integrated Microelectromechanical Systems: A Perceptive on MEMS in the 90s, Proceedings of IEEE Micro Electro Mechanical Systems, pp.33-38, (1991).

DOI: 10.1109/memsys.1991.114765

Google Scholar

[7] H., Miyajima, and M., Mehregany, High-Aspect-Ratio Photolithography for MEMS Applications, Journal of Microelectromechanical Systems, Vol. 4, No. 4, pp.220-229, (1995).

DOI: 10.1109/84.475549

Google Scholar

[8] W., Koing, D.F., Dauw, G., Levy, and U., Panten, EDM-Future Steps towards the Machining of Ceramics, Annals of the CIRP, Vol. 37, No. 2, pp.623-631, (1988).

DOI: 10.1016/s0007-8506(07)60759-8

Google Scholar

[9] H.H., Langen, T., Masuzawa, and M., Fujino, A Micro-EDM/Assembly System Unit for Microparts Fabrication, IEEE International Workshop on Emerging Technologies and Factory Automation, Australia, pp.229-237, (1993).

DOI: 10.1109/etfa.1993.396406

Google Scholar

[10] H.H., Langen, T., Masuzawa, and M., Fujino, Modular Method for Microparts Machining and Assembly with Self-Alignment, Annals of the CIRP, Vol. 44, No. 1, pp.173-176, (1995).

DOI: 10.1016/s0007-8506(07)62300-2

Google Scholar

[11] K., Egashira, and T., Masuzawa, Microultrasonic Machining by the Application of Workpiece Vibration, Annals of the CIRP, Vol. 48, No. 1, pp.131-134, (1999).

DOI: 10.1016/s0007-8506(07)63148-5

Google Scholar

[12] C.L. Kuo, J.D. Huang, and H.Y., Liang, Precise Micro-Assembly through an Integration of Micro-EDM and Nd-YAG, International Journal of Advanced Manufacturing, Vol. 20, pp.454-458, (2002).

DOI: 10.1007/s001700200177

Google Scholar

[13] Jing-Dae Huang, Chia-Lung Kuo, Pin-Plate Micro Assembly by Integrating Micro-EDM and Nd-YAG Process, International Journal of Machine Tools & Manufacture, Vol. 42, No. 13, pp.1455-1464.

DOI: 10.1016/s0890-6955(02)00060-3

Google Scholar