Paper Titles
Pulse Electric Current Sintering of Iron-Base Powders Prepared by High Energy Milling
p.445
Design and Performance Study of a 3-DOF Micropositioning Table
p.450
Relation Study of Roughness and Glossiness to Fractal for Granite Surface Profiles
p.455
Experimental Research on High-Speed Machining Pearlitic Gray Cast Iron
p.459
Study on EDM Polishing of CVD Diamond Films
p.464
Development of an Integrated Instrument for Nucleic Acid Pyrosequencing Detection
p.469
Monitoring of End-Mill Behavior with Its Projection Image
p.474
Job-Shop Scheduling Method Based on Modified Immune Algorithm
p.481
Research on Ultra-Low Feed Servo Control Technology of Ultra-Precision Machine Based on Semi-Closed Loop Control
p.486

Study on EDM Polishing of CVD Diamond Films

Article Preview

Abstract:

Chemical vapor deposition (CVD) diamond is known for its superior characteristics such as hardness, toughness and wear resistance. However, due to these factors, machining CVD diamond is a difficult material removal process. A new technique to polish CVD diamond film efficiently is reported in the present paper. In the CVD deposition process, boron was doped into diamond to fabricate high-quality semi-conductive film, which make it possible to machine diamond film by electro discharged machining (EDM) method. The relationship between EDM parameter and removal processing was investigated in details. The machined surface of boron doped (B-doped) diamond films was studied by Scanning Electron Microscope (SEM) and Raman Scattering Spectroscopy (Raman). The experimental results show that EDM polishing is a highspeed material removal and low cost method for CVD diamond polishing. When the discharge current and pulse-on time increase in a certain range, the cutting-off speed and roughness will increase correspondingly. The roughness of EDM polished CVD diamond film surface is Ra<0.5μm when the discharge current is at 4A and pulse-on time is at 200μs.

You might also be interested in these eBooks
Advances in Machining & Manufacturing Technology VIII View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 315-316)

Pages:

464-468

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.315-316.464

Citation:

Cite this paper

Online since:

July 2006

Authors:

Wen Zhuang Lu, Dun Wen Zuo, Min Wang, Feng Xu, Xiang Feng Li

Keywords:

B-Doped, CVD Diamond, Electro Discharge Machining (EDM), Polishing

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2006 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] D. Zuo, B.K. Xiang, W.Z. Lu and et al: Proc. 6 th ICPMT (Xi'an, China Sept 18-23 2002).

Google Scholar

[2] D. Zuo, X.F. Li, M. Wang and et al: Proc. IMCC'2000 ( HongKong, Aug 59-61, 2000).

Google Scholar

[3] C.J. Tang, A.J. Neves, A.J.S. Fernandes and et al: Diamond and Related Materials, Vol. 12 (2003) No. 8, pp.1411-1416.

Google Scholar

[4] A.P. Malshe, B.S. Park, W.D. Brown and et al: Diamond and Related Materials, Vol. 8 (1999), pp.1198-1213.

Google Scholar

[5] R. Kuschnereit, P. Hess, D. Albert and et al: Thin Solid Films, Vol. 312 (1998), pp.66-72.

Google Scholar

[6] X.L. Peng, Y.C. Tsui and T.W. Clyne: Diamond and Related Materials, Vol. 6 (1997), pp.1612-1621.

Google Scholar

[7] F. Brunet, P. Germi and M. Pernet: Thin Solid Films, Vol. 322 (1998), pp.143-147.

DOI: 10.1016/s0040-6090(97)00925-5

Google Scholar

[8] W. Chunlei, H. Akimitsu, J. Nan and et al: Thin Solid Films, Vol. 308/309 (1997), pp.279-283.

Google Scholar

[9] R. Cremer, R. Mertens, D. Neuschuttz and et al: Thin Solid Films, Vol. 355-356 (1999), pp.127-133.

Google Scholar

[10] J. Michler, M. Mermoux, Y.V. Kaenel and et al: Thin Solid Films, Vol. 357 (1999), pp.189-201.

DOI: 10.1016/s0040-6090(99)00528-3

Google Scholar

[11] L.H. Li, H.Q. Zhang, X.M. Cui and et al: Chin. Phys. Soc., Vol. 50 (2001) No. 8, pp.1549-1554.

Google Scholar

[12] H. d. Zhang, J. m. Liu, J. h. Song and et al: Surface Technology, Vol. 30 (2001) No. 1, pp.15-18.

Google Scholar

[13] J.M. Liu, Z. Jiang, H.D. Zhang and et al: Journal of University of Science and Technology, Vol. 23 (2001) No. 1, pp.42-44.

Google Scholar

[14] Z.M. Yu, T.C. Kuang, X.J. Bai and et al: Cemented Carbide, Vol. 17 (2000) No. 9, pp.151-155.

Google Scholar