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Authors: Akihisa Kubota, Masahiko Yoshimura, Takashi Watayo, Yoshitaka Nakanishi, Mutsumi Touge
Abstract:We have developed advanced lapping and polishing methods for silicon carbide (SiC) substrates using an Fe abrasive particles and hydrogen...
146
Authors: Jun Zhan Hou, Wei Zhou, Ning Zhao
Abstract:Magnesium alloys have been increasingly used in automotive and aerospace components and in portable microelectronic devices due to their...
150
Authors: Akihiko Nemoto, Hitoshi Ohmori, Yasuhiko Murata, Nobuhide Itoh
Abstract:To cope with increasing demands on ultraprecision profiling and finishing of aspheric lens molds, we have implemented an ultra/...
155
Authors: J.C. Huang, Yung Jin Weng, Yung Chun Weng, Y.F. Chan, Hsu Kang Liu, H.S. Fang
Abstract:Electrochemical polish technology could enhance the chemo-mechanical polishing efficiency of copper material. During the electrochemical...
159
Authors: Toshimichi Moriwaki
Abstract:A new ultrasonic vibration cutting device for ultraprecision elliptical vibration cutting has been developed. The elliptical vibration...
164
Authors: Ning Lou, Ioan D. Marinescu, Michael C. Weismiller
Abstract:As demand for high-quality machined tools considerably grows, ELID, a new and efficient technology, has been successfully brought into the...
169
Authors: Hou Xiao Wang, Wei Zhou, Er Ping Li
Abstract:Nano-precision machining using focused ion beam (FIB) is widely applied in many fields. So far, FIB-based nanofabrication for specific...
174
Authors: Yuki Kaneko, Masanori Kunieda
Abstract:This research aims to develop a reverse simulation method to obtain the shape of tool electrode before machining from the shapes of workpiece...
178
Authors: Zhen Yu Zhang, Rudy Irwan, Han Huang
Abstract:Surface characteristics of CZT wafers machined using wire sawing, free abrasives lapping and polishing and ultra-precision grinding were...
183
Authors: Nan Nan Liu, Pei Ge Shao, Shripad R. Kulkarni, Jian Hong Zhao, Jeroen A. van Kan
Abstract:For applications of injection mould fabrication in the field of MEMS, proton beam writing (PBW) and UV lithography are combined to...
188
Showing 31 to 40 of 165 Paper Titles