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Papers by Author: A. Franquet

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Photoresist Characterization and Wet Strip after Low-k Dry Etch

Authors: Martine Claes, Quoc Toan Le, J. Keldermans, Els Kesters, Marcel Lux, A. Franquet, Guy Vereecke, Paul W. Mertens, M.M. Frank, Robert Carleer, P. Adriaensens, D. Vanderzande

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